Patents by Inventor Alan Zdunek

Alan Zdunek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MICRO ELECTROMECHANICAL SYSTEMS FOR DELIVERING HIGH PURITY FLUIDS IN A CHEMICAL DELIVERY SYSTEM
    Publication number: 20070151616
    Abstract: Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.
    Type: Application
    Filed: February 20, 2007
    Publication date: July 5, 2007
    Inventors: Dmitry Znamensky, Alan Zdunek
  • Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
    Patent number: 7195026
    Abstract: Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.
    Type: Grant
    Filed: December 12, 2003
    Date of Patent: March 27, 2007
    Inventors: Dmitry Znamensky, Alan Zdunek
  • Method and apparatus for retrofitting existing real time control systems for monitoring, controlling, and distributing chemicals during electroplating
    Publication number: 20060172427
    Abstract: Chemical treatment process control, including a virtual sensor based upon artificial intelligence that automatically computes and predicts additive concentrations in chemical baths used in manufacturing to compensate for the lag time in obtaining data from real-time analyzers (RTA). Once actual measurement data is obtained, bath concentrations can be further adjusted if necessary. Also disclosed is the retrofitting of a RTA with a controller where the data signal from the RTA has a proprietary communication protocol that is converted by hardware and/or software into a signal having an open communication protocol for transmission to the controller for controlling electrochemical bath concentration. Further disclosed is a method of controlling chemical concentration of electrochemical baths by predicting the depletion of chemicals during manufacture and causing dosing and/or draining of a portion of the bath during the time delay between RTA analyses.
    Type: Application
    Filed: December 7, 2005
    Publication date: August 3, 2006
    Inventors: Omar Germouni, Alan Zdunek
  • Method and apparatus for monitoring, dosing and distribution of chemical solutions
    Publication number: 20050051433
    Abstract: It is an object of the present invention to provide a system and method for monitoring, dosing and distribution of a chemical composition in a material treatment process, the chemical composition containing at least one additive for maintaining quality of the chemical treatment process.
    Type: Application
    Filed: April 19, 2004
    Publication date: March 10, 2005
    Inventors: Alan Zdunek, Omar Germouni, Alejandro Barajas
  • Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
    Publication number: 20040159351
    Abstract: Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.
    Type: Application
    Filed: December 12, 2003
    Publication date: August 19, 2004
    Inventors: Dmitry Znamensky, Alan Zdunek