Patents by Inventor Alex K Tim Poon

Alex K Tim Poon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reticle stage with reaction force cancellation
    Patent number: 6597435
    Abstract: A three-degree-of-freedom guideless reticle stage is used with a reaction force-countermass assembly. An anti-gravity device such as a flexure is provided between the reticle stage and the reaction force-countermass assembly. The anti-gravity device offsets the weight of the stage to the reaction force-countermass assembly. Improved reticle-positioning is provided, with minimized distortion to the stage base, reduced forces on the frame, high servo bandwidth, three-degree-of-freedom positioning, high throughput, minimized geometry and low moving mass.
    Type: Grant
    Filed: October 9, 2001
    Date of Patent: July 22, 2003
    Assignee: Nikon Corporation
    Inventors: Alex K Tim Poon, W. Thomas Novak
  • Reticle stage with reaction force cancellation
    Publication number: 20030067592
    Abstract: A three-degree-of-freedom guideless reticle stage is used with a reaction force-countermass assembly. An anti-gravity device such as a flexure is provided between the reticle stage and the reaction force-countermass assembly. The anti-gravity device offsets the weight of the stage to the reaction force-countermass assembly. Improved reticle-positioning is provided, with minimized distortion to the stage base, reduced forces on the frame, high servo bandwidth, three-degree-of-freedom positioning, high throughput, minimized geometry and low moving mass.
    Type: Application
    Filed: October 9, 2001
    Publication date: April 10, 2003
    Inventors: Alex K. Tim Poon, W. Thomas Novak