Patents by Inventor Alex Salonik

Alex Salonik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for combined photothermal modulated reflectance and photothermal IR radiometric system
    Publication number: 20050225765
    Abstract: A method and apparatus for evaluating a semiconductor wafer. A combination of a photothermal modulated reflectance method and system with a photothermal IR radiometry system and method is utilized to provide information which can be used to determine properties of semiconductor wafers being evaluated. The system and method can provide for utilizing a common probe source and a common intensity modulated energy source. The system and method further provide an infrared detector for monitoring changes in infrared radiation emitted from a sample, and photodetector for monitoring changes in beam reflected from the sample.
    Type: Application
    Filed: June 2, 2005
    Publication date: October 13, 2005
    Inventors: Lena Nicolaides, Alex Salonik