Abstract: In a lithographic process, product units such as semiconductor wafers are subjected to lithographic patterning operations and chemical and physical processing operations. Alignment data or other measurements are made at stages during the performance of the process to obtain object data representing positional deviation or other parameters measured at points spatially distributed across each unit. This object data is used to obtain diagnostic information by performing a multivariate analysis to decompose a set of vectors representing the units in the multidimensional space into one or more component vectors. Diagnostic information about the industrial process is extracted using the component vectors. The performance of the industrial process for subsequent product units can be controlled based on the extracted diagnostic information.

Abstract: A method includes receiving a document for displaying on a display of the client device. The method includes identifying a first portion and a second portion of the document having a first level of content hierarchy, and determining a first text corresponding to the first portion and a second text corresponding to the second portion of the document. The method includes generating a first outline entry including the first text and a second outline entry including the second text, and displaying a selectable entry point on a graphical user interface. The method includes, in response to a selection of the selectable entry point, displaying an outline window, including the first outline entry and the second outline entry, and navigating to the first portion of the received document or the second portion of the document in response to a selection of the first outline entry or the second outline entry.

Abstract: A method includes receiving a document for displaying on a display of the client device. The method includes identifying a first portion and a second portion of the document having a first level of content hierarchy, and determining a first text corresponding to the first portion and a second text corresponding to the second portion of the document. The method includes generating a first outline entry including the first text and a second outline entry including the second text, and displaying a selectable entry point on a graphical user interface. The method includes, in response to a selection of the selectable entry point, displaying an outline window, including the first outline entry and the second outline entry, and navigating to the first portion of the received document or the second portion of the document in response to a selection of the first outline entry or the second outline entry.