Patents by Inventor Alexander Menck

Alexander Menck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mirror for reflecting electromagnetic radiation as well as illumination and imaging method employing the same
    Patent number: 6948821
    Abstract: A mirror arrangement for reflecting electromagnetic radiation has a mirror body with a mirror side disposed towards the radiation to be reflected and at least one extension sensor located at the mirror body for detecting a deformation state of the mirror body. The mirror body includes semiconductor layer where the at least one extension sensor is located.
    Type: Grant
    Filed: July 22, 2002
    Date of Patent: September 27, 2005
    Assignee: Carl Zeiss SMT AG
    Inventor: Alexander Menck
  • Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system
    Patent number: 6885491
    Abstract: A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.
    Type: Grant
    Filed: March 20, 2002
    Date of Patent: April 26, 2005
    Assignee: Carl-Zeiss-Stiftung (trading as Carl Zeiss)
    Inventors: Martin Ross-Messemer, Alexander Menck, Frank Höller, Kurt Franke, Günter Martin, Hagen Schmidt, Manfred Weihnacht
  • Array for reducing the coherence of a coherent radiation beam
    Publication number: 20040179364
    Abstract: The invention relates to an array for reducing the coherence of a coherent radiation beam (6), wherein a reflector (1) defining an inner space is provided with a diffusely reflecting inner surface (4), wherein said reflector (1) has an inlet hole (2) through which the radiation beam (6) can be injected into the inner space, in addition to an outlet hole (3) through which the rays of the radiation beam (6) can come out after at least one reflection on the inner surface (4).
    Type: Application
    Filed: May 4, 2004
    Publication date: September 16, 2004
    Inventors: Matthias Burkhardt, Rainhard Steiner, Alexander Menck, Lars Erdmann, Jorg BIschoff
  • Spectrometer arrangement
    Patent number: 6597763
    Abstract: A spectrometer arrangement is disclosed for the determination of a radiation wavelength of radiation emitted from a radiation source to be measured. The arrangement includes a diffraction grating on which the radiation of the radiation source to be measured is incident at a predetermined angle, wherein the diffraction grating is provided by a reflection grating having a variable lattice constant. The arrangement also includes a radiation detector for receiving from the radiation source to be measured radiation diffracted at a predetermined angle at the diffraction grating.
    Type: Grant
    Filed: August 21, 2001
    Date of Patent: July 22, 2003
    Assignee: Carl-Zeiss-Stiftung
    Inventors: Frank Höller, Martin Ross-Messemer, Alexander Menck
  • Mirror for reflecting electromagnetic radiation as well as illumination and imaging method employing the same
    Publication number: 20030030922
    Abstract: A mirror arrangement (1) for reflecting electromagnetic radiation (13) is proposed which comprises a mirror body (5) with a mirror side (11) disposed towards the radiation to be reflected and at least one extension sensor (37) provided at the mirror body (5) for detecting a deformation state of the mirror body (5). The mirror arrangement is distinguished in that the mirror body (5) comprises a semiconductor layer (5, 61) at which the at least one extension sensor (37) is provided.
    Type: Application
    Filed: July 22, 2002
    Publication date: February 13, 2003
    Inventor: Alexander Menck
  • Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system
    Publication number: 20030007712
    Abstract: A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.
    Type: Application
    Filed: March 20, 2002
    Publication date: January 9, 2003
    Inventors: Martin Ross-Messemer, Alexander Menck, Frank Holler, Kurt Franke, Gunter Martin, Hagen Schmidt, Manfred Weihnacht
  • Spectrometer arrangement
    Publication number: 20020075996
    Abstract: A spectrometer arrangement is disclosed for the determination of a radiation wavelength of radiation emitted from a radiation source to be measured. The arrangement includes a diffraction grating on which the radiation of the radiation source to be measured is incident at a predetermined angle, wherein the diffraction grating is provided by a reflection grating having a variable lattice constant. The arrangement also includes a radiation detector for receiving from the radiation source to be measured radiation diffracted at a predetermined angle at the diffraction grating.
    Type: Application
    Filed: August 21, 2001
    Publication date: June 20, 2002
    Inventors: Frank Holler, Martin Ross-Messemer, Alexander Menck