Patents by Inventor Alexander N. Lemer

Alexander N. Lemer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RAPID THERMAL PROCESSING CHAMBER WITH MICRO-POSITIONING SYSTEM
    Publication number: 20130043632
    Abstract: Methods and apparatus for rapid thermal processing of a planar substrate including axially aligning the substrate with a substrate support or with an empirically determined position are described. The methods and apparatus include a sensor system that determines the relative orientations of the substrate and the substrate support.
    Type: Application
    Filed: October 19, 2012
    Publication date: February 21, 2013
    Inventors: Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron M. Hunter, Blake R. Koelmel, Alexander N. Lemer, Nir Merry