Patents by Inventor Alisa Hart

Alisa Hart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chucks and methods for refurbishing same
    Patent number: 8968503
    Abstract: Novel methods for extending electrostatic chuck lifetimes are provided. The methods involve providing a chuck having a metal cooling plate attached to a ceramic top plate, and after a period of use, disassembling the chuck, and providing a new chuck including the used metal cooling plate. In certain embodiments, the use of a low temperature bond material uniquely allows the described disassembly and reassembly without damage to other parts of the chuck.
    Type: Grant
    Filed: October 29, 2013
    Date of Patent: March 3, 2015
    Assignee: Novellus Systems, Inc.
    Inventors: Alisa Hart, John C. Boyd, Liza Palma, Alasdair Dent
  • ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME
    Publication number: 20140124123
    Abstract: Novel methods for extending electrostatic chuck lifetimes are provided. The methods involve providing a chuck having a metal cooling plate attached to a ceramic top plate, and after a period of use, disassembling the chuck, and providing a new chuck including the used metal cooling plate. In certain embodiments, the use of a low temperature bond material uniquely allows the described disassembly and reassembly without damage to other parts of the chuck.
    Type: Application
    Filed: October 29, 2013
    Publication date: May 8, 2014
    Applicant: Novellus Systems, Inc.
    Inventors: Alisa Hart, John C. Boyd, Liza Palma, Alasdair Dent
  • Electrostatic chucks and methods for refurbishing same
    Patent number: 8597448
    Abstract: Novel methods for extending electrostatic chuck lifetimes are provided. The methods involve providing a chuck having a metal cooling plate attached to a ceramic top plate via indium bonding, and after a period of use, disassembling the chuck, and providing a new chuck including the used metal cooling plate. In certain embodiments, the use of indium as a bond material uniquely allows the described disassembly and reassembly without damage to other parts of the chuck.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: December 3, 2013
    Assignee: Novellus Systems, Inc.
    Inventors: Alisa Hart, John C. Boyd, Liza Palma, Alasdair Dent
  • ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME
    Publication number: 20110155299
    Abstract: Novel methods for extending electrostatic chuck lifetimes are provided. The methods involve providing a chuck having a metal cooling plate attached to a ceramic top plate via indium bonding, and after a period of use, disassembling the chuck, and providing a new chuck including the used metal cooling plate. In certain embodiments, the use of indium as a bond material uniquely allows the described disassembly and reassembly without damage to other parts of the chuck.
    Type: Application
    Filed: December 29, 2009
    Publication date: June 30, 2011
    Inventors: Alisa Hart, John C. Boyd, Liza Palma, Alasdair Dent