Patents by Inventor Allan Daniel O'Brien

Allan Daniel O'Brien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for reducing semiconductor wafer breakage
    Patent number: 6934595
    Abstract: In a system and method to reduce wafer breakages in a wafer handling system, the position of a wafer on a platen is monitored and closing of the platen on a vacuum chamber is prevented if a misaligned wafer is detected. In one embodiment the wafer position is monitored by monitoring the air pressure in vacuum channels of a platen faceplate.
    Type: Grant
    Filed: February 26, 2003
    Date of Patent: August 23, 2005
    Assignee: National Semiconductor Corp.
    Inventor: Allan Daniel O'Brien