Abstract: An electrode array microchip, fabricated preferrably using CMOS technology, comprising electrodes made with overglass cuts over metal2 regions is disclosed. Overglass cuts of dimensions approximately an order of magnitude smaller than dimensions quoted in current design rules for CMOS technology are successfully employed to make exposed electrodes of dimensions on the order of microns. Thus, the electrode array chip can be produced cheaply on commercial fabrication lines. The invention finds many uses in biology and medicine, particularly when applied to the measurement of neural electrical activity.

Abstract: An integrated circuit inductor is disclosed which can be fabricated by adding simple follow-on steps to standard fabrication line processes. In a preferred embodiment, standard CMOS technology is used to fabricate a multi-turn coil having its axis normal to the layers of oxide, polysilicon, and metal which form the coil. For a coil 100 microns on a side, an inductance on the order of 10 nH can be achieved. By including a magnetic core in the design using the disclosed procedure, this value can be increased to as high as 0.1 mH. Thus, inductor values ranging from 0.001 mH-0.1 mH can be physically implemented as integrated, highly-miniaturized CMOS designs for analog operation in the range of approximately 1-100 MHz.