Abstract: An optical element (100) is provided comprising a first surface (102) for emitting and/or receiving electromagnetic radiation, the first surface being arranged for optically coupling to, or being optically coupled to, a portion of an optical fibre (104) having an axis. The optical element (100) comprising a second surface (106) positioned for emitting and/or receiving electromagnetic radiation in a direction transversal to the axis of the optical fibre (104), wherein the optical element (100) has a first focal length for electromagnetic radiation emitted and/or received by an inner portion of the second surface (106) and a second focal length for electromagnetic radiation emitted and/or received by an outer portion of the second surface (106), the first and second focal lengths being different focal lengths. A method of forming an optical device comprising the optical element (100) and further comprising an optical fibre coupled to the optical element is also provided.

Abstract: A method of fabricating an imaging system as well as to a corresponding imaging system. The method includes providing a substrate; and forming, by means of a 3D-printing technique, a 3D structure on the substrate, wherein the forming of the 3D structure includes forming a stack of at least two diffractive optical elements in a single printing step.

Abstract: An endoscope includes a shaft having a distal end, an optical imaging device at the distal end of the shaft for producing a real image of an object observed by means of the endoscope and at least one of an image transfer device for transmitting the real image and an image sensor for capturing the real image. The imaging device has curved light-refracting interfaces, which are tilted in relation to one another.

Abstract: The present invention relates to a method and an assembly for chromatic confocal spectral interferometery, in particular also for spectral domain OCT (SD-OCT) using multi-spectral light. A multiple (e.g. two, three, four, etc.) axial splitting of foci in the interferometric object arm is performed using a multifocal (e.g. bifocal, trifocal, quattro-focal, etc.) optical component, forming thereby at least two, three or even several groups of chromatically split foci in the depth direction. The multifocal optical component is made of a diffractive optical element (712) and a Schwarzschild objective (5). At least two, three, four or even more differently colored foci of different groups of foci coincide in at least one confocal point in the object space of the setup.

Abstract: The present invention relayes to a method and an assembly for chromatic confocal spectral interferometery, in particular also for spectral domain OCT (SD-OCT) using multi-spectral light. A multiple (e.g. two, three, four, etc.) axial splitting of foci in the interferometric object arm is performed using a multifocal (e.g. bifocal, trifocal, quattro-focal, etc.) optical component, forming thereby at least two, three or even several groups of chromatically split foci in the depth direction. The multifocal optical component is made of a diffractive optical element (712) and a Schwarzschild objective (5). At least two, three, four or even more differently colored foci of different groups of foci coincide in at least one confocal point in the object space of the setup.

Abstract: The present invention relates to a method of fabricating an imaging system as well as to a corresponding imaging system. The method comprises the steps of:—providing a substrate;—forming, by means of a 3D-printing technique, a 3D-structure (100) on the substrate, wherein the forming of the 3D-structure (100) comprises forming a stack of at least two diffractive optical elements (10) in a single printing step.

Abstract: An endoscope includes a shaft having a distal end, an optical imaging device at the distal end of the shaft for producing a real image of an object observed by means of the endoscope and at least one of an image transfer device for transmitting the real image and an image sensor for capturing the real image. The imaging device has curved light-refracting interfaces, which are tilted in relation to one another.

Abstract: This disclosure relates to pumping light systems and methods for using a disc laser. A focusing device with a reflecting surface focuses a pumping light beam onto a laser-active medium. A deflecting system deflects the pumping light beam between reflecting regions formed on the reflecting surface that are arranged in different angle regions around a central axis of the reflecting surface in at least a first annular region and a second annular region. The deflecting systems are configured to perform at least one deflection of the pumping light beam between two reflecting regions of the first annular region and at least one deflection between two reflecting regions of the second annular region.

Abstract: This disclosure relates to pumping light systems and methods for using a disc laser. A focusing device with a reflecting surface focuses a pumping light beam onto a laser-active medium. A deflecting system deflects the pumping light beam between reflecting regions formed on the reflecting surface that are arranged in different angle regions around a central axis of the reflecting surface in at least a first annular region and a second annular region. The deflecting systems are configured to perform at least one deflection of the pumping light beam between two reflecting regions of the first annular region and at least one deflection between two reflecting regions of the second annular region.

Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the invention relates to a method for spectroscopically measuring absorption. The measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.

Abstract: Disclosed herein is a measuring probe, an apparatus, and a method for infrared spectroscopy. In some embodiments the measuring probe may have an elongated form with a first end for coupling and decoupling infrared light into and out of the measuring probe and a second end. In other embodiments, the measuring probe may comprise an attenuated total reflection (ATR) prism arranged at the second end of the measuring probe. The ATR prism may include at least a first surface having at least one measuring portion configured to be brought in optical contact with a measured object. The ATR prism may include at least a second surface having at least one reflective portion. In some embodiments, the ATR prism may include a cutting portion for cutting through the measured object.

Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the present disclosure relates to a method for spectroscopically measuring absorption. In some embodiments, the measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.

Abstract: A metrology system serves to examine an object arranged in an object field using EUV illumination light. An illumination optics of the metrology system has a collector mirror which is arranged in the beam path directly downstream of an EUV light source. Downstream of the collector mirror, less than three additional illumination mirrors are arranged in the beam path between the collector mirror and the object field. An intermediate focus is arranged in the beam path between the collector mirror and the additional illumination mirror. The metrology system further includes a magnifying imaging optics for imaging the object field into an image field in an image plane. As a result a metrology system is obtained which comprises an illumination optics that ensures an efficient illumination of the object field by means of illumination parameters which are well adapted to the illumination situation of current EUV projection exposure apparatuses.

Abstract: A metrology system serves to examine an object arranged in an object field using EUV illumination light. An illumination optics of the metrology system has a collector mirror which is arranged in the beam path directly downstream of an EUV light source. Downstream of the collector mirror, less than three additional illumination mirrors are arranged in the beam path between the collector mirror and the object field. An intermediate focus is arranged in the beam path between the collector mirror and the additional illumination mirror. The metrology system further includes a magnifying imaging optics for imaging the object field into an image field in an image plane. As a result a metrology system is obtained which comprises an illumination optics that ensures an efficient illumination of the object field by means of illumination parameters which are well adapted to the illumination situation of current EUV projection exposure apparatuses.

Abstract: An imaging optics is provided for lithographic projection exposure for guiding a bundle of imaging light with a wavelength shorter than 193 nm via a plurality of mirrors for beam-splitter-free imaging of a reflective object in an object field in an object plane into an image field in an image plane. An object field point has a central ray angle which is smaller than 3°. At least one of the mirrors is a near-field mirror. The imaging optics which can allow for high-quality imaging of a reflective object.

Abstract: A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ?1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.

Abstract: The invention relates to an optical delay module for lengthening the propagation path of a light beam comprises a first spherical mirror and a second spherical mirror, the first spherical mirror and the second spherical mirror having equal radii of curvature, the first and the second mirror being arranged on a common axis of symmetry with concave sides of the first and second mirrors being situated opposite one another at a distance from one another which corresponds to the radii of curvature of the first and second mirrors. The module also includes a coupling-in area for coupling the light beam into a space between the first and second mirrors and a coupling-out area for coupling the light beam out of the space between the first and second mirrors.

Abstract: In one aspect, the disclosure features an optical system configured to create from a beam of light an intensity distribution on a surface, whereby the optical system comprises at least a first optical element which splits the incident beam into a plurality of beams some of which at least partially overlap in a first direction on said surface and whereby the optical system further comprises at least a second optical element which displaces at least one of said beams in a second direction on said surface.

Abstract: A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ?1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.

Abstract: An objective comprising axial symmetry, at least one curved mirror and at least one lens and two intermediate images. The objective includes two refractive partial objectives and one catadioptric partial objective. The objective includes a first partial objective, a first intermediate a image, a second partial objective, a second intermediate image, and a third partial objective. At least one of the partial objectives is purely refractive. One of the partial objectives is purely refractive and one is purely catoptric.