Abstract: An improved lift-off process for forming metallized interconnections between various regions on a semi-conductor device relies on the use of a particular polyimide in forming a protective mask over the device. The polyimide is a copolymer of an aromatic cycloaliphatic diamine and a dianhydride which allows the resulting structure to withstand particularly high temperatures in the fabrication process. In particular, the polyamide when subjected to high temperature metallization under vacuum remains sufficiently soluble to be substantially completely removed from the device by immersion in common organic solvents. This allows high temperature metallization as interconnects for integrated circuits.

Abstract: A process is provided for fabricating self-aligned contacts to the surface of an integrated circuit. The process includes the steps of depositing a layer of silicon dioxide 12 on the surface of a semiconductor structure 10; depositing a layer of polyimide 15 on the surface of the silicon dioxide 12; defining openings 23 in the polyimide material 15 and the silicon dioxide 12 to thereby expose regions of the semiconductor structure 10; and depositing metal 22 across the underlying surface and in the openings 23. In the preferred embodiment metal 22 is substantially the same thickness as silicon dioxide 12, and polyimide material 15 is masked using sequentially deposited layers of silicon dioxide 18 and photoresist 21.

Abstract: A process is described for removing polyimide regions adhered to the surface of a semiconductor structure 10 which includes the steps of heating the structure 10 and the polyimide regions 12 to between 450.degree. and 490.degree. C., immersing the structure in a solution of one of methylene chloride and ethylene diamine/hydrazine, and ultrasonerating the solution and the semiconductor structure.

Abstract: A gaseous breakdown display device is disclosed capable of producing a chromatic picture or display pattern. This is accomplished by a selective excitation of electrodes associated with dielectric sheets containing phosphors capable of emitting the primary colors. Also disclosed is a dot matrix display device capable of producing an alphanumerical display device.