Abstract: A method and apparatus for monitoring and evaluating effects of electrostatic discharge associated with semiconductor manufacturing are disclosed. The method may include, for example, exposing a test photomask that contains an ESD sensitive geometry to a single or a variety of semiconductor manufacturing procedures. The test photomask may be analyzed to determine how much, if any, degradation of its geometry has occurred as a result of the exposure.

Abstract: A transmission unit for drive units is used to achieve at least two operational states: a first operational state for the transmission of power with at least two gear steps, and a second operational state for braking. The transmission unit includes an input shaft and an output shaft, a hydraulic transmission part and a mechanical transmission part. The two transmission parts are arranged in series. The hydraulic part includes at least two blade wheels in the form of a primary blade wheel and a secondary blade wheel, which together form at least one toroid operating space which can be filled with operating fluid. The two blade wheels are coupled to the input shaft of the transmission unit and to the mechanical part via at least part of the first operational state in such a way that power is transmitted from the primary blade wheel to the mechanical part via the secondary blade wheel.

Abstract: An apparatus for gear shifting control with improved shift quality during gear shifting includes a gearbox unit containing at least one gear branch for power transfer via a hydrodynamic clutch. The hydrodynamic clutch can be coupled in series with a mechanical gearing part containing a device for realizing at least two speeds. In the course of power transfer via the hydrodynamic clutch during a gear shift operation between two mechanical speeds, the fill factor of the hydrodynamic clutch is so altered that a variable which at least indirectly characterizes the rotational speed of the primary bucket wheel of the hydrodynamic clutch is held substantially constant over a certain range of the gear shift operation.

Abstract: A continuous hydrostatic-mechanical power division transmission has at least two operating ranges between which it is switched by shift elements, with a first, mechanical part (II) including a planetary differential gear (13) and a second, hydrostatic part (I) including two power-linked adjustable hydraulic units (H1 and H2) which can be operated in both directions either as a pump or as a motor and which are coupled to the mechanical part (II). An annulus (19) of a planetary differential (13) is used to control the direction and speed of rotation of a gear box output shaft (12) in the individual operating ranges and is coupled to the first hydraulic unit (H1). In a first operating range, the second hydraulic unit (H2) drives via a gear-shift element (K1, K2) to the output shaft (12). The first hydraulic unit (H1) coupled to the annulus (19) works as a pump while the second hydraulic unit (H2) works as a motor.