Patents by Inventor Andreas Feustel

Andreas Feustel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micromechanical Capacitive Sensor Element
    Publication number: 20110108932
    Abstract: A manufacturing method for producing a micromechanical sensor element which may be produced in a monolithically integrable design and has capacitive detection of a physical quantity is described. In addition to the manufacturing method, a micromechanical device containing such. a sensor element, e.g., a pressure sensor or an acceleration sensor, is described.
    Type: Application
    Filed: November 4, 2005
    Publication date: May 12, 2011
    Inventors: Hubert Benzel, Stefan Finkbeiner, Frank Fischer, Helmut Baumann, Lars Metzger, Roland Scheuerer, Peter Brauchle, Andreas Feustel, Matthias Neubauer