Abstract: A sensor has a thin film element, the thin film element having a temperature-dependent electrical resistance. The thin film element includes a platinum layer, which is doped with zircon or zircon oxide. The thin film element can be arranged on a membrane to create a mass airflow sensor.

Abstract: A flow sensor has a diaphragm and a resistive film positioned on the diaphragm. A heater is formed from the resistive film and temperature sensors are arranged on both sides of the heater. On both sides of the heater are additional temperature sensors, which are interconnected by an interconnect resistor and formed from the resistive film.

Abstract: In a mass flow sensor having a frame of monocrystalline silicon and a membrane fixed therein, a heating element and, if indicated, temperature-measuring elements are provided on the membrane. A heat-conducting element, which extends from the membrane across the frame, is provided in the edge area of the membrane. The heating element, the heat-conducting element and, if indicated, temperature-measuring elements are patterned out of a single metal layer.

Abstract: In a measuring element for a flow sensor and a method for manufacturing the measuring element, a heater, a temperature sensor, and a printed circuit trace are patterned out of a platinum layer. Furthermore, an interconnection region is used for contacting the measuring chip with bonding wires. An additional metal layer is provided for the interconnection region.

Abstract: A device is disclosed for crankshaft-synchronous detection of a periodically changing variable of an internal combustion engine, for example the load, which is measured by a sensor whose output signal which is preprocessed or filtered in a suitable fashion is sensed with a selectable timing pattern. The start of sampling is resynchronized for each segment, the signal of a CA sensor being used for synchronization, the said CA sensor sensing a disc connected to the crankshaft and outputting one signal edge per segment. The combination for crankshaft-synchronous sampling with constant timing with respect to the segment permits the use of different load detection sensors with improved accuracy in comparison with previously used methods. The average value of the load for each segment can be determined from the sampled measured values and the quantity of air inducted per power cycle can also be determined.