Patents by Inventor Andrei Ivanovich Netchitaliouk

Andrei Ivanovich Netchitaliouk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for performing limited area spectral analysis
    Patent number: 7602484
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Grant
    Filed: December 7, 2007
    Date of Patent: October 13, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Matthew F. Davis, Lei Lian, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk
  • Method and apparatus for performing limited area spectral analysis
    Patent number: 7330244
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: February 12, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Matthew F. Davis, Lei Lian, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk
  • Method and apparatus for performing limited area spectral analysis
    Patent number: 7158221
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Grant
    Filed: December 23, 2003
    Date of Patent: January 2, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Matthew F. Davis, Lei Lian, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk