Patents by Inventor Andrei Mikhailovich Yakunn

Andrei Mikhailovich Yakunn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components
    Publication number: 20130114059
    Abstract: A metal component (262M, 300M) is designed for use in an EUV lithography apparatus, for example as a spectral purity filter (260) or a heating element (300) in a hydrogen radical generator. An exposed surface of the metal is treated (262P, 300P) to inhibit the formation of an oxide of said metal in an air environment prior to operation. This prevents contamination of optical components by subsequent evaporation of the oxide during operation of the component at elevated temperatures.
    Type: Application
    Filed: June 6, 2011
    Publication date: May 9, 2013
    Applicant: ASML Netherlands B.V.
    Inventors: Martin Jacobus Johan Jak, Vadim Yevgenyevich Banine, Wouter Anthon Soer, Andrei Mikhailovich Yakunn, Maarten Van Kampen, Gerard Frans Jozef Schasfoort