Patents by Inventor Andrew Barnett Cowe

Andrew Barnett Cowe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inductively-coupled torodial plasma source
    Patent number: 7166816
    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.
    Type: Grant
    Filed: May 3, 2004
    Date of Patent: January 23, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Xing Chen, William M. Holber, Andrew Barnett Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz
  • Inductively-coupled toroidal plasma source
    Patent number: 6815633
    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: November 9, 2004
    Assignee: Applied Science & Technology, Inc.
    Inventors: Xing Chen, William M. Holber, Andrew Barnett Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz