Abstract: The invention relates to a magnetic recording device comprising (a) a disk comprising a substrate, a metallic magnetic layer, a carbon layer and a lubricant layer; (b) a motor associated with a disk operable for rotating the disk; (c) a head supported on an air bearing slider for magnetically reading data to or magnetically writing data from the magnetic layer on the disk, the trailing surface of the slider coated with a multilayered film having low surface energy; and (d) an actuator connected to the slider for moving the head across the disk. The multilayered film on the trailing surface of the slider substantially reduces stiction of the slider.

Abstract: A method for modifying a substrate surface, including the step of applying a high density plasma to the substrate surface in the presence of a hydrofluorocarbon gas and a carrier gas to form an antiwetting layer on the substrate surface. Optionally, the method including a cleaning step of contacting the slider surface with a carrier gas for a period of time effective to clean the surface.

Abstract: A method of processing an assembly to prepare the assembly for etch patterning, the assembly including a row or bar mounted on a substrate, the row or bar bordered by a recess, the method including placing the assembly within a frame; applying a contiguous adhesive film across said assembly and said frame; depositing a fluid in said frame, said fluid forming in said recess; and removing said contiguous adhesive film.

Abstract: A can for use in an etching system including a continuous conductive wall with a first opening to be placed adjacent the reactor upper electrode and a second opening to be placed adjacent the reactor lower electrode. Preferably, the conductive wall is a dual wall further including an inner wall and an outer wall, the inner and outer wall separated by one or more openings configured normal to the height of the continuous wall, the openings allowing for the flow of coolant through the wall.

Abstract: The invention is a method of patterning the air bearing surface of a ceramic slider preferably including alumina and titanium carbide. The method includes the steps of forming an etch pattern by depositing and developing a photoresist on the ceramic slider, and reactive ion etching the slider air bearing surface using an etchant gas of argon, sulfur hexafluoride, and methyltrifluoride flowing at a rate which provides a smooth patterned surface on the slider air bearing surface.

Abstract: The present invention discloses a slider having an alumina overcoat layer that is etched so as to be tapered, sloped, inclined, recessed, or faceted with respect to the air-bearing surfaces of the slider. The present invention also relates to a method for eliminating overcoat protrusions by etching away portions of the alumina overcoat layer at row level. Preferably, photolithographic techniques are used at row level to both etch the air-bearing surfaces of the slider and to etch away potential protrusion regions of the alumina overcoat.