Patents by Inventor Andrew David Chew

Andrew David Chew has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum pumping system having multiple pumps
    Patent number: 11815079
    Abstract: A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10?2 mbar to a second pressure between 10?3 mbar and 10?6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: November 14, 2023
    Assignee: Edwards Limited
    Inventor: Andrew David Chew
  • A VACUUM PUMPING SYSTEM HAVING MULTIPLE PUMPS
    Publication number: 20220316462
    Abstract: A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10?2 mbar to a second pressure between 10?3 mbar and 10?6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.
    Type: Application
    Filed: April 24, 2020
    Publication date: October 6, 2022
    Inventor: Andrew David Chew
  • A TURBOMOLECULAR PUMP, A VACUUM PUMPING SYSTEM AND A METHOD OF EVACUATING A VACUUM CHAMBER
    Publication number: 20220120282
    Abstract: A turbomolecular pump, vacuum pumping system and method of evacuating a vacuum chamber is disclosed. The turbomolecular pump comprises: a rotor comprising a plurality of rotor blade rows, a stator comprising a plurality of stator blade rows and an outer casing, the rotor being rotatably mounted within the stator; wherein at least a portion of a surface of at least one of the rotor and the stator comprise a non-evaporable getter material.
    Type: Application
    Filed: May 29, 2020
    Publication date: April 21, 2022
    Inventors: Andrew David Chew, Peter Charles Lamb