Abstract: A torsional hinged mirror assembly having a hinge plate having a central portion and a pair of torsional hinges extending outwardly in opposite directions from the central portion along a first axis and a first pair of support spines extending from the central portion in a second direction substantially perpendicular to the first axis. A mirror plate is attached to the hinge plate and has a reflecting side and a back side, a second pair of support spines located along a perimeter of the back side and extending generally in the second direction, wherein the first pair of support spines on the hinge plate and the second pair of support pines on the mirror plate are aligned and the back side of the mirror plate being attached to the hinge plate.

Abstract: A method for increasing the resonant frequency of a torsional hinged device having a reduced attaching area between the torsional hinges and the supporting anchors. The resonant frequency is increased by adding a material over the reduced area to stiffen the connection between the torsional hinges and the support anchors.

Abstract: A method for increasing the resonant frequency of a torsional hinged device having a reduced attaching area between the torsional hinges and the supporting anchors. The resonant frequency is increased by adding a material over the reduced area to stiffen the connection between the torsional hinges and the support anchors.

Abstract: A method of adjusting the resonant frequency of a torsional hinged device such as a resonant mirror is disclosed. A material such as printer ink, epoxy, or solder balls is applied to the tips of the torsional hinged device to lower the frequency into a selected frequency range.

Abstract: A torsional hinged resonant device having an improved anchor support for providing inertia drive. The area by the anchors connecting the torsional hinges to the support member are thinned to have a reduced cross section. The reduced or thinned area increases flexibility such that less force is required to generate a desired angular rotation.

Abstract: An oscillating torsional hinged device, such as a mirror, having the advantages of an oscillating device with permanent magnets mounted on the hinges, but without excessive size is disclosed. The permanent magnets are mounted in the areas of the anchor members rather than directly on the hinges.

Abstract: A torsional hinged mirror structure having back-to-back reflective surfaces and suitable for use in a laser printer imaging system is disclosed. There is also disclosed an optical layer and a support structure that does not interfere with either of the two incident light beams as the two reflected beam sweeps.

Abstract: A multilevel mirror plate suitable for use with a torsional hinged mirror assembly is laser milled to provide a more effective truss structure in less time and at a reduced cost.

Abstract: A method of adjusting the resonant frequency of a torsional hinged device such as a resonant mirror is disclosed. Material is removed from selected portions (such as for example the tips) of the torsional hinged device to raise the frequency of said device into a selected frequency range.

Abstract: System and method for operating four resonant torsional hinged mirrors such as torsional hinged MEMS devices at the same oscillating frequency suitable for use in a color printer requiring four serially arranged line printers.

Abstract: System and method for generating lines of data on a photosensitive medium for use with a display or a printing apparatus. The lines of data are generated by two or more modulated and parallel laser light beams onto a resonant pivoting torsional hinged mirror. The pivoting mirror sweeps the two modulated light beams back and forth across the photosensitive medium to provide bi-directional printing. Relative motion between the photosensitive medium and the plane of the sweeping light beam is provided by moving the photosensitive medium when used with a printing apparatus or by also orthogonally moving the sweeping plane of the light beams when used with a display device.

Abstract: A robust torsional hinged device and a method of fabricating the device are disclosed. Unlike the prior art torsional hinged devices, the width “W” of the hinge is selected to be greater than the thickness “T” of the silicon wafer from which the torsional hinged device is etched. Therefore, since the top and bottom surfaces of the silicon wafer are polished, the larger dimension of the rectangular cross-sectional hinge lies along a polished surface rather than the rougher etched surface. Since the roughness or striations act as stress concentration and since the greater stress levels of a torsional hinge lie along the largest dimension, a more robust hinge is obtained.

Abstract: A system and method for providing a resonant beam sweep about a first axis. A mirror or reflective surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hinges. A light source reflects a beam of light from the mirror such that the oscillating mirror produces a beam sweep across a target area. The resonant beam sweep is moved orthogonally on the target area by a gimbals portion of the mirror pivoting about a second axis according to one embodiment. A second independent mirror provides the orthogonal movement according to a second embodiment.

Abstract: A magnetic drive for providing pivotal motion to a mirror device. The magnetic drive may be used to drive any torsional hinged mirror, but is particularly suitable for driving a high-speed, torsional hinged mirror at its resonant frequency for use as the drive engine of a printer or visual display. According to a first embodiment, a dual axis mirror uses a first pair of torsional hinges to provide the resonant beam sweep and a second pair of torsional hinges to provide high-speed movement orthogonal to the beam sweep to maintain successive images of the sweep parallel to each other. The mass and movement of inertia of the resonant mirror are reduced by relocating permanent magnet sets to the axis of rotation. The reduced mass and movement of inertia allows a significantly higher resonant frequency and corresponding high pivotal speed.

Abstract: A magnetic drive for providing pivotal motion to a functional surface, such as a mirror. The magnetic drive may be used to drive any torsional hinged device, but is particularly suitable for driving a torsional hinged mirror. According to a first embodiment, a dual axis functional surface uses a first pair of torsional hinges to provide primary movement to the functional surface and a second pair of torsional hinges provides movement orthogonal to the primary movement to allow positioning in two directions. The mass and movement of inertia of the functional surface is reduced by relocating permanent magnet sets to the axis of rotation. The reduced mass and movement of inertia results in a stiff robust hinge having a resonant frequency above about 120 Hz.