Abstract: Several methods are disclosed for the generation of coherent short-wavelength electromagnetic radiation through optical nonlinear frequency mixing means. The invention involves several stages of efficient nonlinear frequency conversion to shift the output of high-power infra-red fiber-lasers into the vacuum ultraviolet (VUV). The described laser source architecture is designed around non-critically phase-matched (NCPM) sum-frequency mixing (SFM) interactions in the nonlinear crystal CLBO. The NCPM interaction is an optimum condition for bulk frequency conversion of cw radiation because it allows tight focusing of the input laser radiation without Poynting vector walk-off, thereby increasing the non-linear drive significantly. The sub-200-nm output wave is generated from SFM of a long-wave IR laser field and a short-wave UV laser field.

Abstract: A self-seeding laser comprises a slave oscillator cavity coupled to a Littman cavity that operates in a single longitudinal mode. The slave oscillator cavity comprises the following elements positioned in sequential order to provide a first beam path: an end mirror, a gain medium, a grating having a groove spacing, and an output mirror. The first beam path has an angle of incidence upon the grating, and light traveling along the first beam path is zeroth-order diffracted by the grating. A tuning mirror faces the grating, for reflecting light diffracted away from the first beam path by the grating. The tuning mirror establishes the Littman cavity. The gain medium is pumped by a pulsed pump beam. The pump beam activates a pump region within the gain medium, the pump region having a radius.