Patents by Inventor Andrew Pavloski

Andrew Pavloski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Position sensor system for substrate holders
    Patent number: 5844683
    Abstract: The position sensor (20) and method of the present invention allows detecting proper placement of substrate holders (25) in a processing apparatus (35), and can also be used to detect displacement of the substrates (70) within the substrate holder (25). The position sensor (20) comprises (a) an optical emitter (120) capable of emitting a light beam, (b) an optical sensor (125) capable of sensing the light beam emitted by the optical emitter (120), and (c) a light regulator (130) in a path (135) of the light beam that is capable of blocking the light beam from the optical sensor when the substrate holder (25) is improperly positioned in the process chamber (40).
    Type: Grant
    Filed: May 22, 1996
    Date of Patent: December 1, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Andrew Pavloski, Dmitry Sklyar, Andrej Rolny