Patents by Inventor Andrew S. Fong
Andrew S. Fong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10163605Abstract: Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the variable through a model of the RF system, and counting an output of the model for the variable to generate a count. The method further includes determining whether the count meets a count threshold, generating a statistical value of the variable at the output of the model upon determining that the count meets the count threshold, and sending the statistical value to the RF system to adjust the variable.Type: GrantFiled: October 31, 2017Date of Patent: December 25, 2018Assignee: Lam Research CorporationInventors: Andrew S. Fong, John C. Valcore, Jr.
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Patent number: 9947513Abstract: Systems and methods for performing edge ramping are described. A system includes a base RF generator for generating a first RF signal. The first RF signal transitions from one state to another. The transition from one state to another of the first RF signal results in a change in plasma impedance. The system further includes a secondary RF generator for generating a second RF signal. The second RF signal transitions from one state to another to stabilize the change in the plasma impedance. The system includes a controller coupled to the secondary RF generator. The controller is used for providing parameter values to the secondary RF generator to perform edge ramping of the second RF signal when the second RF signal transitions from one state to another.Type: GrantFiled: May 25, 2017Date of Patent: April 17, 2018Assignee: Lam Research CorporationInventors: John C. Valcore, Jr., Bradford J. Lyndaker, Andrew S. Fong
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Publication number: 20180053632Abstract: Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the variable through a model of the RF system, and counting an output of the model for the variable to generate a count. The method further includes determining whether the count meets a count threshold, generating a statistical value of the variable at the output of the model upon determining that the count meets the count threshold, and sending the statistical value to the RF system to adjust the variable.Type: ApplicationFiled: October 31, 2017Publication date: February 22, 2018Inventors: Andrew S. Fong, John C. Valcore, JR.
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Patent number: 9831065Abstract: Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the variable through a model of the RF system, and counting an output of the model for the variable to generate a count. The method further includes determining whether the count meets a count threshold, generating a statistical value of the variable at the output of the model upon determining that the count meets the count threshold, and sending the statistical value to the RF system to adjust the variable.Type: GrantFiled: February 17, 2016Date of Patent: November 28, 2017Assignee: Lam Research CorporationInventors: Andrew S. Fong, John C. Valcore, Jr.
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Publication number: 20170263419Abstract: Systems and methods for performing edge ramping are described. A system includes a base RF generator for generating a first RF signal. The first RF signal transitions from one state to another. The transition from one state to another of the first RF signal results in a change in plasma impedance. The system further includes a secondary RF generator for generating a second RF signal. The second RF signal transitions from one state to another to stabilize the change in the plasma impedance. The system includes a controller coupled to the secondary RF generator. The controller is used for providing parameter values to the secondary RF generator to perform edge ramping of the second RF signal when the second RF signal transitions from one state to another.Type: ApplicationFiled: May 25, 2017Publication date: September 14, 2017Inventors: John C. Valcore, JR., Bradford J. Lyndaker, Andrew S. Fong
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Patent number: 9673026Abstract: Systems and methods for performing edge ramping are described. A system includes a base RF generator for generating a first RF signal. The first RF signal transitions from one state to another. The transition from one state to another of the first RF signal results in a change in plasma impedance. The system further includes a secondary RF generator for generating a second RF signal. The second RF signal transitions from one state to another to stabilize the change in the plasma impedance. The system includes a controller coupled to the secondary RF generator. The controller is used for providing parameter values to the secondary RF generator to perform edge ramping of the second RF signal when the second RF signal transitions from one state to another.Type: GrantFiled: July 7, 2016Date of Patent: June 6, 2017Assignee: Lam Research CorporationInventors: John C. Valcore, Jr., Bradford J. Lyndaker, Andrew S. Fong
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Publication number: 20160322202Abstract: Systems and methods for performing edge ramping are described. A system includes a base RF generator for generating a first RF signal. The first RF signal transitions from one state to another. The transition from one state to another of the first RF signal results in a change in plasma impedance. The system further includes a secondary RF generator for generating a second RF signal. The second RF signal transitions from one state to another to stabilize the change in the plasma impedance. The system includes a controller coupled to the secondary RF generator. The controller is used for providing parameter values to the secondary RF generator to perform edge ramping of the second RF signal when the second RF signal transitions from one state to another.Type: ApplicationFiled: July 7, 2016Publication date: November 3, 2016Inventors: John C. Valcore, JR., Bradford J. Lyndaker, Andrew S. Fong
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Patent number: 9408288Abstract: Systems and methods for performing edge ramping are described. A system includes a base RF generator for generating a first RF signal. The first RF signal transitions from one state to another. The transition from one state to another of the first RF signal results in a change in plasma impedance. The system further includes a secondary RF generator for generating a second RF signal. The second RF signal transitions from one state to another to stabilize the change in the plasma impedance. The system includes a controller coupled to the secondary RF generator. The controller is used for providing parameter values to the secondary RF generator to perform edge ramping of the second RF signal when the second RF signal transitions from one state to another.Type: GrantFiled: October 24, 2012Date of Patent: August 2, 2016Assignee: Lam Research CorporationInventors: John C. Valcore, Jr., Bradford J. Lyndaker, Andrew S. Fong
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Publication number: 20160172162Abstract: Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the variable through a model of the RF system, and counting an output of the model for the variable to generate a count. The method further includes determining whether the count meets a count threshold, generating a statistical value of the variable at the output of the model upon determining that the count meets the count threshold, and sending the statistical value to the RF system to adjust the variable.Type: ApplicationFiled: February 17, 2016Publication date: June 16, 2016Inventors: Andrew S. Fong, John C. Valcore, JR.
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Patent number: 9295148Abstract: Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the variable through a model of the RF system, and counting an output of the model for the variable to generate a count. The method further includes determining whether the count meets a count threshold, generating a statistical value of the variable at the output of the model upon determining that the count meets the count threshold, and sending the statistical value to the RF system to adjust the variable.Type: GrantFiled: November 21, 2013Date of Patent: March 22, 2016Assignee: Lam Research CorporationInventors: Andrew S. Fong, John C. Valcore, Jr.
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Publication number: 20140167613Abstract: Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the variable through a model of the RF system, and counting an output of the model for the variable to generate a count. The method further includes determining whether the count meets a count threshold, generating a statistical value of the variable at the output of the model upon determining that the count meets the count threshold, and sending the statistical value to the RF system to adjust the variable.Type: ApplicationFiled: November 21, 2013Publication date: June 19, 2014Applicant: Lam Research CorporationInventors: Andrew S. Fong, John C. Valcore, JR.
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Publication number: 20140076713Abstract: Systems and methods for performing edge ramping are described. A system includes a base RF generator for generating a first RF signal. The first RF signal transitions from one state to another. The transition from one state to another of the first RF signal results in a change in plasma impedance. The system further includes a secondary RF generator for generating a second RF signal. The second RF signal transitions from one state to another to stabilize the change in the plasma impedance. The system includes a controller coupled to the secondary RF generator. The controller is used for providing parameter values to the secondary RF generator to perform edge ramping of the second RF signal when the second RF signal transitions from one state to another.Type: ApplicationFiled: October 24, 2012Publication date: March 20, 2014Inventors: John C. Valcore, JR., Bradford J. Lyndaker, Andrew S. Fong