Abstract: In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. To provide a back up to the fluorine generator, high purity fluorine is also provided in a transportable gas storage vessel, for example, a multi-cylinder pack at a relatively low pressure, typically less than 35 psig. The transportable storage vessel is selectively connected to the fixed storage tank as required to enable the amount of fluorine within the storage tank to be maintained at a desired level.

Abstract: A process for separating the components of a gas mixture in a single adsorption vessel pressure swing adsorption system including the steps: (a) cocurrently passing the gas mixture through the adsorption vessel at a desired adsorption pressure and collecting the nonadsorbed product gas in a storage vessel, (b) cocurrently depressurizing the adsorption vessel and pumping gas removed from the adsorption vessel during this step to the storage vessel, (c) regenerating the adsorbent in the adsorption vessel by countercurrently depressurizing the adsorption vessel, and (d) repressurizing the adsorption vessel to the desired adsorption pressure. Steps (a) and (b) are carried out using gas pumping or compressing devices, and the same or different gas pumping or compressing devices can be used for steps (a) and (b). Step (c) can also be carried out with the pumping device used in step (a).