Patents by Inventor Anindya Nath

Anindya Nath has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11955472
    Abstract: Disclosed are embodiments of a semiconductor structure that includes a semiconductor-controlled rectifier (e.g., for electrostatic discharge (ESD) protection). The SCR can be readily integrated into advanced semiconductor-on-insulator processing technology platforms (e.g., a fully depleted silicon-on-insulator (FDSOI) processing technology platform) that employ hybrid semiconductor substrates (i.e., semiconductor substrates with both bulk semiconductor and semiconductor-on-insulator regions) and is configured with an on-Pwell semiconductor-on-insulator gate structure that is tied to an anode terminal to effectively lower the SCR trigger voltage. To further lower the trigger voltage of the SCR, the Pwell on which the gate structure sits may be made narrower than the gate structure and/or the doping profile of the Pwell on which the gate structure sits may be graded (e.g., P to P? closer to insulator layer).
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 9, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Meng Miao, Alain Loiseau, Souvick Mitra, Wei Liang, Robert J. Gauthier, Jr., Anindya Nath
  • Publication number: 20240105683
    Abstract: Structures including multiple semiconductor devices and methods of forming same. The structure comprises a first device structure including a first well and a second well in a semiconductor substrate, a second device structure including a doped region in the semiconductor substrate, and a first high-resistivity region in the semiconductor substrate. The first well has a first conductivity type, the second well has a second conductivity type opposite to the first conductivity type, and the first well adjoins the second well to define a p-n junction. The doped region of the second device structure has the first conductivity type or the second conductivity type. The high-resistivity region has a higher electrical resistivity than the semiconductor substrate, and the high-resistivity region is positioned between the first device structure and the second device structure.
    Type: Application
    Filed: September 28, 2022
    Publication date: March 28, 2024
    Inventors: Vvss Satyasuresh Choppalli, Anupam Dutta, Rajendran Krishnasamy, Robert Gauthier, JR., Xiang Xiang Lu, Anindya Nath
  • Publication number: 20240096874
    Abstract: The present disclosure relates to a structure including a trigger element within a semiconductor-on-insulator (SOI) substrate, and a silicon controlled rectifier (SCR) under a buried insulator layer of the SOI substrate. The trigger element is between an anode and a cathode of the SCR.
    Type: Application
    Filed: September 15, 2022
    Publication date: March 21, 2024
    Inventors: Anindya NATH, Alain F. LOISEAU, Souvick MITRA
  • Patent number: 11935946
    Abstract: Structures for a silicon-controlled rectifier and methods of forming a structure for a silicon-controlled rectifier. The structure comprises a semiconductor substrate, a dielectric layer on the semiconductor substrate, and a first well and a second well in the semiconductor substrate beneath the dielectric layer. The first well has a first conductivity type, the second well has a second conductivity type opposite to the first conductivity type, and the second well adjoins the first well along a p-n junction. The structure further comprises a first terminal and a second terminal above the dielectric layer, a first connection extending through the dielectric layer from the first terminal to the first well, and a second connection extending through the dielectric layer from the second terminal to the second well.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: March 19, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Shesh Mani Pandey, Souvick Mitra, Anindya Nath
  • Publication number: 20240074167
    Abstract: Embodiments of the disclosure provide a circuit structure including an electrically programmable fuse (efuse) and lateral bipolar transistor. A structure of the disclosure includes a lateral bipolar transistor within a semiconductor layer and over a substrate. An insulator layer is over a portion of the semiconductor layer. An efuse structure is within a polycrystalline semiconductor layer and over the insulator layer. The efuse structure is over a current path through the lateral bipolar transistor.
    Type: Application
    Filed: August 25, 2022
    Publication date: February 29, 2024
    Inventors: Anindya Nath, Ephrem G. Gebreselasie, Rajendran Krishnasamy, Alain F. Loiseau
  • Publication number: 20240072038
    Abstract: Embodiments of the disclosure provide a semiconductor controlled rectifier (SCR) structure and methods to form the same. The SCR structure may include a first polycrystalline semiconductor material on a first insulator and includes a first well therein. A monocrystalline semiconductor material is adjacent the first polycrystalline semiconductor material and includes an anode region and a cathode region therein. A second polycrystalline semiconductor material is on a second insulator and includes a second well therein.
    Type: Application
    Filed: August 25, 2022
    Publication date: February 29, 2024
    Inventors: Anindya Nath, Alain F. Loiseau, Robert J. Gauthier, JR., Souvick Mitra
  • Publication number: 20240063212
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with a diode over a lateral bipolar transistor. A structure according to the disclosure may include a lateral bipolar transistor within a monocrystalline semiconductor over a substrate. An insulator layer is over a portion of the monocrystalline semiconductor. A diode is within a polycrystalline semiconductor on the insulator layer. A cathode of the diode is coupled to a first well within the monocrystalline semiconductor. The first well defines one of an emitter terminal and a collector terminal of the lateral bipolar transistor.
    Type: Application
    Filed: August 18, 2022
    Publication date: February 22, 2024
    Inventors: Anindya Nath, Alain F. Loiseau, Souvick Mitra, Rajendran Krishnasamy
  • Publication number: 20230420448
    Abstract: A structure includes trigger control circuitry for an SCR including: a first transistor having two P-type semiconductor terminals connected to an Nwell and a Pwell of the SCR; a second transistor having two N-type semiconductor terminals connected to the Pwell and ground; and, optionally, an additional transistor having two P-type semiconductor terminals connected to the Nwell and ground. Control terminals of the transistors receive the same control signal (e.g., RST from a power-on-reset). When a circuit connected to the SCR for ESD protection is powered on, ESD risk is limited so RST switches to high. Thus, the first transistor and optional additional transistor turn off and the second transistor turns on, reducing leakage. When the circuit is powered down, the ESD risk increases so RST switches to low. Thus, the first transistor and optional additional transistor turn on and the second transistor turns off, lowering the trigger voltage and current.
    Type: Application
    Filed: June 23, 2022
    Publication date: December 28, 2023
    Inventors: Souvick Mitra, Alain F. Loiseau, Robert J. Gauthier, JR., Meng Miao, Anindya Nath, Wei Liang
  • Publication number: 20230420551
    Abstract: Structures for a silicon-controlled rectifier and methods of forming a structure for a silicon-controlled rectifier. The structure comprises a semiconductor substrate, a dielectric layer on the semiconductor substrate, and a first well and a second well in the semiconductor substrate beneath the dielectric layer. The first well has a first conductivity type, the second well has a second conductivity type opposite to the first conductivity type, and the second well adjoins the first well along a p-n junction. The structure further comprises a first terminal and a second terminal above the dielectric layer, a first connection extending through the dielectric layer from the first terminal to the first well, and a second connection extending through the dielectric layer from the second terminal to the second well.
    Type: Application
    Filed: June 27, 2022
    Publication date: December 28, 2023
    Inventors: Shesh Mani Pandey, Souvick Mitra, Anindya Nath
  • Patent number: 11855074
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to electrostatic discharge devices and methods of manufacture. The structure includes: a plurality of regions of a first dopant type; insulator material separating each region of the plurality of regions of the first dopant type; and a substrate contacting the plurality of regions of the first dopant type, the substrate comprising a base region of a second dopant type different than the first dopant type and an outer segment surrounding the plurality of regions of the first dopant type, the outer segment comprises an electrical resistivity higher than the second dopant type.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: December 26, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Zhiqing Li, William J. Taylor, Jr., Anindya Nath
  • Publication number: 20230411384
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an electrostatic discharge device (ESD) with a pinch resistor and methods of manufacture. The structure includes: a semiconductor substrate; a shallow trench isolation structure extending into the semiconductor substrate; an amorphous layer in the semiconductor substrate and below the shallow trench isolation structure; and a pinch resistor between the shallow trench isolation structure and the amorphous layer.
    Type: Application
    Filed: June 16, 2022
    Publication date: December 21, 2023
    Inventors: Anindya NATH, Robert J. GAUTHIER, JR., Rajendran KRISHNASAMY
  • Publication number: 20230402447
    Abstract: Disclosed are a structure and method. The structure includes a substrate having monocrystalline lower and upper portions and a high resistance portion (e.g., a trap-rich amorphous portion) between the lower and upper portions. An isolation region extends through the upper portion, is above the high resistance portion, and is positioned laterally adjacent to a device section of the upper portion also above the high resistance portion. One or more devices (e.g., a diode, multiple diodes, a diode string, multiple diode strings, etc.) are on the trench isolation region, on the device section, and/or within the device section. The device(s) are separated from the lower portion by the high resistance portion and, potentially, by the isolation region or the device section. Such device(s) can be employed for electrostatic discharge (ESD) protection on RFIC chips and can sustain a larger RF voltage, provide area savings, reduce parasitic capacitance, improve harmonics, etc.
    Type: Application
    Filed: June 14, 2022
    Publication date: December 14, 2023
    Inventors: Anindya Nath, Alain F. Loiseau, Rajendran Krishnasamy, Souvick Mitra
  • Publication number: 20230395590
    Abstract: An integrated circuit (IC) structure with a conductive pathway through resistive semiconductor material, e.g., for bipolar transistors, is provided. The IC structure may include a resistive semiconductor material having a first end coupled to a first doped semiconductor material. The first doped semiconductor material has a first doping type. A doped well may be coupled to a second end of the resistive semiconductor material. The doped well has a second doping type opposite the first doping type. A second doped semiconductor material is coupled to the doped well and has the first doping type. The resistive semiconductor material is within a conductive pathway from the first doped semiconductor material to the second doped semiconductor material.
    Type: Application
    Filed: June 7, 2022
    Publication date: December 7, 2023
    Inventors: Anindya Nath, Rajendran Krishnasamy, Robert J. Gauthier, JR.
  • Publication number: 20230395591
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertically stacked diode-trigger silicon controlled rectifiers and methods of manufacture. The structure includes: a silicon controlled rectifier in a trap rich region of a semiconductor substrate; and at least one diode built in polysilicon (gate material) and isolated by a gate-dielectric.
    Type: Application
    Filed: June 3, 2022
    Publication date: December 7, 2023
    Inventors: Anindya NATH, Souvick MITRA
  • Publication number: 20230395714
    Abstract: Device structures with an isolation well and methods of forming a device structure with an isolation well. The structure comprises a first well of a first conductivity type in a semiconductor substrate, and a second well of a second conductivity type in the semiconductor substrate. The second conductivity type is opposite to the first conductivity type. The first well includes a plurality of segments, and the second well is positioned in a vertical direction between the segments of the first well and a top surface of the semiconductor substrate.
    Type: Application
    Filed: June 3, 2022
    Publication date: December 7, 2023
    Inventors: Anindya Nath, Alain Loiseau, Rajendran Krishnasamy
  • Publication number: 20230369314
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with resistive semiconductor material for a back well. The IC structure may include a semiconductor substrate having a deep well, and a device within a first portion of the deep well. The device includes a first doped semiconductor material coupled to a first contact, and a second doped semiconductor material coupled to a second contact. The deep well couples the first doped semiconductor material to the second doped semiconductor material. A first back well is within a second portion of the deep well. A first resistive semiconductor material is within the deep well and defines a boundary between the first portion of the deep well and the second portion of the deep well.
    Type: Application
    Filed: May 11, 2022
    Publication date: November 16, 2023
    Inventors: Robert J. Gauthier, JR., Rajendran Krishnasamy, Anupam Dutta, Anindya Nath, Xiangxiang Lu, Satyasuresh Vvss Choppalli, Lin Lin
  • Patent number: 11789004
    Abstract: A sensitive and selective, in-line method to measure and validate the sulfur content at ppb levels in both the liquid and gas phase of an analyte. The method includes patterning graphene, for example to form a mesa structure comprising horizontal or vertical lines or an array of multidentate star features; functionalizing the patterned graphene and attaching nanoparticles to the functionalized graphene to form a device; exposing the device to an analyte in the gas or liquid phase; detecting a change in electrical response when sulfur is present in the analyte; and recovering the device for future use. Also disclosed is the related sulfur detector.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: October 17, 2023
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Evgeniya H. Lock, F. Keith Perkins, Anthony K. Boyd, Rachael L. Myers-Ward, David Kurt Gaskill, Anindya Nath
  • Publication number: 20230197707
    Abstract: Disclosed are embodiments of a semiconductor structure that includes a semiconductor-controlled rectifier (e.g., for electrostatic discharge (ESD) protection). The SCR can be readily integrated into advanced semiconductor-on-insulator processing technology platforms (e.g., a fully depleted silicon-on-insulator (FDSOI) processing technology platform) that employ hybrid semiconductor substrates (i.e., semiconductor substrates with both bulk semiconductor and semiconductor-on-insulator regions) and is configured with an on-Pwell semiconductor-on-insulator gate structure that is tied to an anode terminal to effectively lower the SCR trigger voltage. To further lower the trigger voltage of the SCR, the Pwell on which the gate structure sits may be made narrower than the gate structure and/or the doping profile of the Pwell on which the gate structure sits may be graded (e.g., P to P- closer to insulator layer).
    Type: Application
    Filed: December 17, 2021
    Publication date: June 22, 2023
    Applicant: GlobalFoundries U.S. Inc.
    Inventors: Meng Miao, Alain Loiseau, Souvick Mitra, Wei Liang, Robert J. Gauthier, JR., Anindya Nath
  • Patent number: 11658480
    Abstract: Embodiments of the disclosure provide an electrostatic discharge (ESD) device, including: an input pad; an underlapped field effect transistor (UL-FET) with a trigger voltage Vt, including: an underlapped drain region coupled to the input pad; a source region coupled to ground; and a gate structure coupled to the input pad; and a blocking layer separating the underlapped drain region from the gate structure of the UL-FET by an underlap distance.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: May 23, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anindya Nath, Zhiqing Li, Souvick Mitra, Alain Loiseau, Wei Liang
  • Patent number: 11430881
    Abstract: The present disclosure relates to a polysilicon-diode triggered compact silicon controlled rectifier. In particular, the present disclosure relates to a structure including a silicon controlled rectifier (SCR) which includes an n-well adjacent and in direct contact with a p-well, the SCR includes at least one shallow trench isolation (STI) region, and at least one polysilicon diode on top of the at least one STI region.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: August 30, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Anindya Nath, Alain F. Loiseau