Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

Abstract: A method of manufacturing a sensor is provided. The method includes disposing a sacrificial layer on a substrate, disposing a low-thermal-conductivity layer on the sacrificial layer, and disposing a first set of conductive arms and a second set of conductive arms on the low-thermal-conductivity layer to form a plurality of thermal junctions. The plurality of thermal junctions is adapted to form a plurality of hot junctions and a plurality of cold junctions when subjected to a difference in temperature. The method also includes removing the sacrificial layer and a portion of the low-thermal-conductivity layer to form a cavity therein. The cavity is configured to provide insulation for the plurality of hot junctions. A thermopile sensor is also provided, and a calorimetric gas sensor implementing the thermopile sensor is provided.

Abstract: According to one embodiment, a first capacitive element may be provided and associated with a surface where a fouling layer is to be detected. A second capacitive element may also be provided, and a capacitance between the first and second capacitive elements may be used to detect formation of the fouling layer. According to another embodiment, a thermal device is provided proximate to a surface where a fouling layer is to be detected. A detector (e.g., a thermometer or vibration detector) may detect a condition associated with the surface, and formation of the fouling layer may be determined based at least in part on the condition.

Abstract: A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

Abstract: The invention provides a contactless sensor device operable for sensing water vapor or a predetermined chemical vapor including a thin film, wherein the thin film includes a nanostructured sensing layer and a soft magnetic layer disposed directly adjacent to the nanostructured sensing layer. The thin film has a first mass, a first density, and a first magnetostrictive resonance frequency prior to the nanostructured sensing layer adsorbing a predetermined amount of a predetermined vapor and a second mass, a second density, and a second magnetostrictive resonance frequency subsequent to the nanostructured sensing layer adsorbing the predetermined amount of the predetermined vapor. The sensor device also includes a driving coil disposed indirectly adjacent to and at a predetermined distance from the thin film, the driving coil operable for generating an alternating-current magnetic field used to query a shift in the magnetostrictive resonance frequency of the thin film.

Abstract: An integrated spectrometer instrument, including an optical source formed on a chip, the optical source configured to generate an incident optical beam upon a sample to be measured. Collection optics formed on the chip are configured to receive a scattered optical beam from the sample, and filtering optics formed on the chip are configured to remove elastically scattered light from the scattered optical beam at a wavelength corresponding to the optical source. A tunable filter formed on the chip is configured to pass selected wavelengths of the scattered optical beam, and a photo detector device formed on the chip is configured to generate an output signal corresponding to the intensity of photons passed through the tunable filter.

Abstract: A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.

Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

Abstract: A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

Abstract: A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

Abstract: A method for determining analyte concentration levels is provided. The method includes acquiring radiation scattered off or transmitted by a target, analyzing at least a first portion of the radiation via a first technique to generate a first measurement of analyte concentration levels, and analyzing at least a second portion of the radiation via a second technique to generate a second measurement of analyte concentration levels. The method further determines analyte concentration levels based on at least one of the first measurement or the second measurement. In addition, a system for implementing the method and a probe for measuring and monitoring the analyte concentration levels is provided.

Abstract: A porous nanozeolite material having a first dimension less than about 1 micron and a second dimension less than about 100 microns. The nanozeolite material comprises pores having an average diameter less than about 50 nm. A method of making microporous nanozeolites is provided. The method comprises the steps of providing an aqueous solution comprising at least one nanozeolite precursor material or zeolite particles, and electrospinning the aqueous solution onto a substrate to form an electrospun material. The electrospun material comprises microporous nanozeolites. A method of making mesoporous nanozeolites is also provided. The method comprises the step of providing an aqueous solution comprising a nanozeolite precursor material and at least one structure directing agent, and electrospinning the aqueous solution onto a substrate to form an electrospun mesoporous nanozeolite material. A gas sensor device is provided. The device comprises nanozeolite sensing material.

Abstract: A method of manufacturing a sensor is provided. The method includes disposing a sacrificial layer on a substrate, disposing a low-thermal-conductivity layer on the sacrificial layer, and disposing a first set of conductive arms and a second set of conductive arms on the low-thermal-conductivity layer to form a plurality of thermal junctions. The plurality of thermal junctions is adapted to form a plurality of hot junctions and a plurality of cold junctions when subjected to a difference in temperature. The method also includes removing the sacrificial layer and a portion of the low-thermal-conductivity layer to form a cavity therein. The cavity is configured to provide insulation for the plurality of hot junctions. A thermopile sensor is also provided, and a calorimetric gas sensor implementing the thermopile sensor is provided.

Abstract: A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

Abstract: The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.

Abstract: A sensor for measuring an input signal is provided. The sensor includes a transducer having a soft magnetic material. The transducer may be disposed on a spring element. The soft magnetic material produces a change in impedance when the transducer is stimulated by the input signal. The impedance change is representative of a magnitude of the input signal. The sensor further includes a circuit coupled to the transducer, which is operable to measure the impedance change to determine the magnitude of the input signal. A method of operating the sensor is also provided.

Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

Abstract: The present invention provides a nano-calorimeter device operable for measuring and characterizing the thermodynamic and other physical properties of materials that are confined to essentially nano-scale dimensions. The nano-calorimeter device including a thin film membrane having a first surface and a second surface. The nano-calorimeter device also including a frame structure disposed adjacent to and in thermal contact with the first surface of the thin film membrane, the frame structure defining a plurality of hollow cells adjacent to and in thermal contact with the first surface of the thin film membrane.

Abstract: A piezoelectric microvalve and method for controlling a fluid flow through a piezoelectric microvalve are provided. The microvalve includes an inlet plenum and a flow directing structure for directing a fluid flow, wherein a first side of the structure is in fluid communication with the inlet plenum. The microvalve also includes a piezoelectric bending actuator comprising a flap portion responsive to a command signal for controlling a fluid flow through the flow directing structure. The microvalve further includes an outlet plenum in fluid communication with a second side of the flow directing structure.