Abstract: A pressure sensing device includes a deflectable membrane structure to provide a deflection dependent output signal based on a pressure load, and a mechanical abutment structure for adjusting a spring constant of the deflectable membrane structure depending on the deflection of the deflectable membrane structure, wherein the mechanical abutment structure provides an abutting condition of the deflectable membrane structure when the deflection of the deflectable membrane structure exceeds a deflection threshold, wherein the abutting condition results in a change from a first spring constant to an increased, second spring constant of the deflectable membrane structure.

Abstract: A method of developing a resist layer includes providing a substrate comprising an exposed resist layer formed on a surface of the substrate, applying a developer to the substrate, applying a rinsing liquid to the substrate, and rotating the substrate. By influencing a rotation-induced vibration of the substrate, an agglomeration of dissolved out resist components is suppressed. Moreover, an apparatus for developing a resist layer is described.