Patents by Inventor Anja Plugge

Anja Plugge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for regulating a pressure in a chamber
    Patent number: 5944049
    Abstract: A pressure for a chamber is regulated by controlling either the exhaust pressure at the exhaust side of a first vacuum pump or the internal pressure at a compression stage of the first vacuum pump, where the first vacuum pump is directly communicating with the chamber. The pressure of the chamber can be regulated by combinations of the following: controlling the variable rotational frequency of a roots vacuum pump, a pre-vacuum pump, or a high compression pump; controlling a control valve between a pre-vacuum pump and the first vacuum pump; controlling a control valve for injecting gas into the exhaust side of the first vacuum pump or into the compression stage of the first vacuum pump; and controlling a control valve or control valves for bypassing the first vacuum pump or a compression stage or compression stages of the first vacuum pump.
    Type: Grant
    Filed: July 15, 1997
    Date of Patent: August 31, 1999
    Assignees: Applied Materials, Inc., Leybold Vacuum GmbH
    Inventors: Christian Beyer, Keith Trenton, Mariusch Gregor, Robert Stolle, Rudolph Bahnen, Anja Plugge, Heinz Frings, Karl-Heinz Ronthaler, Dennis Smith, Jayesh Patel