Patents by Inventor Anlun Tang

Anlun Tang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7796259
    Abstract: Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: September 14, 2010
    Assignee: WeiFour, Inc.
    Inventors: Anlun Tang, Yingwu Lian, Jonglip Choi
  • Publication number: 20100007882
    Abstract: Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.
    Type: Application
    Filed: July 9, 2008
    Publication date: January 14, 2010
    Inventors: Anlun Tang, Yingwu Lian, Jonglip Choi
  • Patent number: 6686994
    Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square.
    Type: Grant
    Filed: June 4, 2002
    Date of Patent: February 3, 2004
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Dieter Wilk, Anlun Tang, Eric N. Vella, Rex Runyon, Jamie M. Sullivan
  • Patent number: 6686995
    Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square. The PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.
    Type: Grant
    Filed: June 4, 2002
    Date of Patent: February 3, 2004
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Dieter E. Wilk, Anlun Tang, Eric N. Vella, Rex Runyon, Jamie Michael Sullivan, Ralph Thomas Johnson
  • Publication number: 20040001198
    Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square. The PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.
    Type: Application
    Filed: June 4, 2002
    Publication date: January 1, 2004
    Applicant: KLA-Tencor Technologies Corporation
    Inventors: Dieter E. Wilk, Anlun Tang, Eric N. Vella, Rex Runyon, Jamie Michael Sullivan, Ralph Thomas Johnson
  • Publication number: 20030184739
    Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square.
    Type: Application
    Filed: June 4, 2002
    Publication date: October 2, 2003
    Applicant: KLA-Tencor Technologies Corporation
    Inventors: Dieter E. Wilk, Anlun Tang, Eric N. Vella, J. Rex Runyon, Jamie M. Sullivan