Patents by Inventor Anna Trovato

Anna Trovato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for providing a semiconductor device with silicon filled gaps
    Patent number: 11501968
    Abstract: Method for filling a gap, comprising providing in a deposition chamber a semiconductor substrate having a gap, wherein a bottom of the gap includes a crystalline semiconducting material and wherein a side wall of the gap includes an amorphous material; depositing a silicon precursor in the gap.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: November 15, 2022
    Assignee: ASM IP Holding B.V.
    Inventors: Dieter Pierreux, Anna Trovato, Kelly Houben, Steven van Aerde, Bert Jongbloed, Wilco A. Verweij
  • METHOD FOR PROVIDING A SEMICONDUCTOR DEVICE WITH SILICON FILLED GAPS
    Publication number: 20210151315
    Abstract: Method for filling a gap, comprising providing in a deposition chamber a semiconductor substrate having a gap, wherein a bottom of the gap includes a crystalline semiconducting material and wherein a side wall of the gap includes an amorphous material; depositing a silicon precursor in the gap.
    Type: Application
    Filed: November 9, 2020
    Publication date: May 20, 2021
    Inventors: Dieter Pierreux, Anna Trovato, Kelly Houben, Steven van Aerde, Bert Jongbloed, Wilco A. Verweij