Abstract: The present invention provides an apparatus (10) for plasma treatment of a substrate surface (16). The apparatus comprises a plasma source (12) for generating a plasma and a plasma-control electrode (14). The apparatus further comprises a drive means for effecting a relative movement between the plasma-control electrode (14) and the plasma source (12) or of the plasma-control electrode (14) and the plasma source (12) relative to the substrate (16). The plasma-control electrode (14) is located adjacent the substrate (16) to facilitate treatment of the substrate surface (16) in a controlled manner.

Abstract: The present invention provides a beam splitter that comprising a body having at least one substantially flat surface. The surface has surface regions arranged to receive radiation at respective incidence angle ranges. At least some of the incidence angle ranges of the radiation received by the respective surface regions differ from one another and each surface region has a respective optical property such that the influence of the respective incident angle range on the wavelength range of reflected and/or transmitted radiation is reduced.