Patents by Inventor Anthony K. Stamper

Anthony K. Stamper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11876123
    Abstract: According to a semiconductor device herein, the device includes a substrate. An active device is formed in the substrate. The active device includes a collector region, a base region formed on the collector region, and an emitter region formed on the base region. An isolation structure is formed in the substrate around the active device. A trench filled with a compressive material is formed in the substrate and positioned laterally adjacent to the emitter region and base region. The trench extends at least partially into the collector region.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: January 16, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anthony K. Stamper, Vibhor Jain, Renata A. Camillo-Castillo
  • Patent number: 11848192
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a heterojunction bipolar transistor having an emitter base junction with a silicon-oxygen lattice interface and methods of manufacture. The device includes: a collector region buried in a substrate; shallow trench isolation regions, which isolate the collector region buried in the substrate; a base region on the substrate and over the collector region; an emitter region composed of a single crystalline of semiconductor material and located over with the base region; and an oxide interface at a junction of the emitter region and the base region.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: December 19, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Anthony K. Stamper, Steven M. Shank, John J. Pekarik
  • Publication number: 20230402453
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich isolation region and methods of manufacture. The structure includes: a first heterojunction bipolar transistor; a second heterojunction bipolar transistor; and a trap rich isolation region embedded within a substrate underneath both the first heterojunction bipolar transistor and the second heterojunction bipolar transistor.
    Type: Application
    Filed: August 8, 2023
    Publication date: December 14, 2023
    Inventors: Vibhor JAIN, John J. ELLIS-MONAGHAN, Anthony K. STAMPER, Steven M. SHANK, John J. PEKARIK
  • Publication number: 20230378183
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.
    Type: Application
    Filed: August 8, 2023
    Publication date: November 23, 2023
    Inventors: Anthony K. STAMPER, Uzma RANA, Siva P. ADUSUMILLI, Steven M. SHANK
  • Patent number: 11823948
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bulk wafer switch isolation structures and methods of manufacture. The structure includes: a bulk substrate material; an active region on the bulk substrate material; an inactive region adjacent to the active region; and an amorphous material covering the bulk substrate material in the inactive region, which is adjacent to the active region.
    Type: Grant
    Filed: March 16, 2022
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Uzma Rana, Anthony K. Stamper, Steven M. Shank, Brett T. Cucci
  • Patent number: 11817479
    Abstract: A transistor includes a bulk semiconductor substrate, and first and second raised source/drain regions above the bulk semiconductor substrate. A gate is between the first and second raised source/drain regions. A first dielectric section is beneath the first raised source/drain region in the bulk semiconductor substrate, and a second dielectric section is beneath the second raised source/drain region in the bulk semiconductor substrate. A first air gap is defined in at least the first dielectric section under the first raised source/drain region, and a second air gap is defined in at least the second dielectric section under the second raised source/drain region. The air gaps reduce off capacitance of the bulk semiconductor structure to near semiconductor-on-insulator levels without the disadvantages of an air gap under the channel region.
    Type: Grant
    Filed: September 29, 2021
    Date of Patent: November 14, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Uzma B. Rana, Steven M. Shank, Anthony K. Stamper
  • Patent number: 11791334
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich isolation region and methods of manufacture. The structure includes: a first heterojunction bipolar transistor; a second heterojunction bipolar transistor; and a trap rich isolation region embedded within a substrate underneath both the first heterojunction bipolar transistor and the second heterojunction bipolar transistor.
    Type: Grant
    Filed: October 20, 2020
    Date of Patent: October 17, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, John J. Ellis-Monaghan, Anthony K. Stamper, Steven M. Shank, John J. Pekarik
  • Publication number: 20230299132
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.
    Type: Application
    Filed: May 26, 2023
    Publication date: September 21, 2023
    Inventors: Vibhor JAIN, Anthony K. STAMPER, John J. ELLIS-MONAGHAN, Steven M. SHANK, Rajendran KRISHNASAMY
  • Patent number: 11764225
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.
    Type: Grant
    Filed: June 10, 2021
    Date of Patent: September 19, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Anthony K. Stamper, Uzma Rana, Siva P. Adusumilli, Steven M. Shank
  • Patent number: 11749559
    Abstract: Structures with altered crystallinity beneath semiconductor devices and methods associated with forming such structures. Trench isolation regions surround an active device region composed of a single-crystal semiconductor material. A first non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. A second non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. The first non-single-crystal layer is arranged between the second non-single-crystal layer and the active device region.
    Type: Grant
    Filed: November 9, 2022
    Date of Patent: September 5, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Steven M. Shank, Anthony K. Stamper, Ian McCallum-Cook, Siva P. Adusumilli
  • Patent number: 11749599
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to dual thickness fuse structures and methods of manufacture. The structure includes a continuous wiring structure on a single wiring level and composed of conductive material having a fuse portion and a thicker wiring structure.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: September 5, 2023
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: John J. Pekarik, Anthony K. Stamper, Vibhor Jain
  • Patent number: 11749717
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a transistor with an embedded isolation layer in a bulk substrate and methods of manufacture. The structure includes: a bulk substrate; an isolation layer embedded within the bulk substrate and below a top surface of the bulk substrate; a deep trench isolation structure extending through the bulk substrate and contacting the embedded isolation layer; and a gate structure over the top surface of the bulk substrate and vertically spaced away from the embedded isolation layer, the deep trench isolation structure and the embedded isolation layer defining an active area of the gate structure in the bulk substrate.
    Type: Grant
    Filed: May 6, 2022
    Date of Patent: September 5, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Uzma Rana, Anthony K. Stamper, Johnatan A. Kantarovsky, Steven M. Shank, Siva P. Adusumilli
  • Patent number: 11728348
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertically stacked field effect transistors and methods of manufacture. The structure includes: at least one lower gate structure on a bottom of a trench formed in substrate material; insulator material partially filling trench and over the at least one lower gate structure; an epitaxial material on the insulator material and isolated from sidewalls of the trench; and at least one upper gate structure stacked vertically above the at least one lower gate structure and located on the epitaxial material.
    Type: Grant
    Filed: October 11, 2021
    Date of Patent: August 15, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Anthony K. Stamper, Steven M. Shank, Siva P. Adusumilli, Michel J. Abou-Khalil
  • Patent number: 11721719
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.
    Type: Grant
    Filed: October 20, 2020
    Date of Patent: August 8, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Anthony K. Stamper, John J. Ellis-Monaghan, Steven M. Shank, Rajendran Krishnasamy
  • Patent number: 11710655
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure, including a semiconductor-based isolation structure on a substrate. A shallow trench isolation (STI) structure may be positioned on the semiconductor-based isolation structure. An active semiconductor region is on the substrate and adjacent each of the semiconductor-based isolation structure and the STI structure. The active semiconductor region includes a doped semiconductor material. At least one device on the active semiconductor region may be horizontally distal to the STI structure.
    Type: Grant
    Filed: October 20, 2021
    Date of Patent: July 25, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anthony K. Stamper, Henry L. Aldridge, Jr., Johnatan A. Kantarovsky, Jeonghyun Hwang
  • Publication number: 20230215869
    Abstract: An integrated circuit (IC) structure, a switch and related method, are disclosed. The IC structure includes an active device, e.g., a switch, over a bulk semiconductor substrate, and an isolation structure under the active device in the bulk semiconductor substrate. The isolation structure may include a trench isolation adjacent the active device in the bulk semiconductor substrate, a dielectric layer laterally adjacent the trench isolation and over the active device, and a porous semiconductor layer in the bulk semiconductor substrate under the dielectric layer laterally adjacent the trench isolation. The IC structure employs a lower cost, low resistivity bulk semiconductor substrate rather than a semiconductor-on-insulator (SOI) substrate, yet it has better performance characteristics for RF switches than an SOI substrate.
    Type: Application
    Filed: January 6, 2022
    Publication date: July 6, 2023
    Inventors: Uzma B. Rana, Steven M. Shank, Anthony K. Stamper
  • Patent number: 11677000
    Abstract: An integrated circuit (IC) structure includes an active device over a bulk semiconductor substrate, and an isolation structure around the active device in the bulk semiconductor substrate. The active device includes a semiconductor layer having a center region, a first end region laterally spaced from the center region by a first trench isolation, a second end region laterally spaced from the center region by a second trench isolation, a gate over the center region, and a source/drain region in each of the first and second end regions. The isolation structure includes: a polycrystalline isolation layer under the active device, a third trench isolation around the active device, and a porous semiconductor layer between the first trench isolation and the polycrystalline isolation layer and between the second trench isolation and the polycrystalline isolation layer.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: June 13, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Uzma B. Rana, Steven M. Shank, Anthony K. Stamper
  • Patent number: 11658177
    Abstract: Semiconductor device structures with substrate biasing, methods of forming a semiconductor device structure with substrate biasing, and methods of operating a semiconductor device structure with substrate biasing. A substrate contact is coupled to a portion of a bulk semiconductor substrate in a device region. The substrate contact is configured to be biased with a negative bias voltage. A field-effect transistor includes a semiconductor body in the device region of the bulk semiconductor substrate. The semiconductor body is electrically isolated from the portion of the bulk semiconductor substrate.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: May 23, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anthony K. Stamper, Michel J. Abou-Khalil, John J. Ellis-Monaghan, Randy Wolf, Alvin J. Joseph, Aaron Vallett
  • Patent number: 11639895
    Abstract: A “lab on a chip” includes an optofluidic sensor and components to analyze signals from the optofluidic sensor. The optofluidic sensor includes a substrate, a channel at least partially defined by a portion of a layer of first material on the substrate, input and output fluid reservoirs in fluid communication with the channel, at least a first radiation source coupled to the substrate adapted to generate radiation in a direction toward the channel, and at least one photodiode positioned adjacent and below the channel.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: May 2, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Vibhor Jain, Steven M. Shank, Anthony K. Stamper, John J. Ellis-Monaghan, John J. Pekarik, Yusheng Bian
  • Publication number: 20230125886
    Abstract: Structures for a transistor including regions for landing gate contacts and methods of forming a structure for a transistor that includes regions for landing gate contacts. The structure includes a field-effect transistor having a source region, a gate region, a gate with a sidewall, and a gate extension with a section adjoined to the sidewall. The structure further includes a dielectric layer over the field-effect transistor, and a gate contact positioned in the dielectric layer to land on at least the section of the gate extension.
    Type: Application
    Filed: October 21, 2021
    Publication date: April 27, 2023
    Inventors: Steven M. Shank, Anthony K. Stamper, Venkata N.R. Vanukuru, Mark Levy