Abstract: Techniques for manufacturing miniaturized diaphragm pumps using additive manufacturing techniques, such as polyjet printing, are provided, as are the pumps and systems that result from using such techniques to produce the pumps. The provided pumps include a compression chamber that has a first surface, a second opposed surface, and a conical outer wall that extends between the first surface and the second surface and that has a bowed configuration in which the outer wall has a generally concave shape. A diaphragm is disposed proximate to the compression chamber, and the pump also includes one or more valves that control the flow of fluid between the compression chamber and one more fluid ports. Fluid can be selectively vacuumed into and exhausted out of the compression chambers. Various manufacturing techniques for fabricating the pumps are also provided.

Abstract: Techniques for manufacturing miniaturized diaphragm pumps using additive manufacturing techniques, such as polyjet printing, are provided, as are the pumps and systems that result from using such techniques to produce the pumps. The provided pumps include a compression chamber that has a first surface, a second opposed surface, and a conical outer wall that extends between the first surface and the second surface and that has a bowed configuration in which the outer wall has a generally concave shape. A diaphragm is disposed proximate to the compression chamber, and the pump also includes one or more valves that control the flow of fluid between the compression chamber and one more fluid ports. Fluid can be selectively vacuumed into and exhausted out of the compression chambers. Various manufacturing techniques for fabricating the pumps are also provided.

Abstract: Articles and methods involving sensors and thin films suitable for use in sensors are generally provided. In some embodiments, the sensors may comprise a graphene oxide component and/or a thin film with a percolated structure. The sensors may have one or more advantageous properties, such as an appropriate value of resistance, a high degree of sensitivity, and a low response time.

Abstract: The present invention relates to vacuum processing systems in which process gases are introduced in a process chamber and are exhausted through a vacuum processing system exhaust path. Deposits made by the exhausted gases in one or more dry vacuum pumps are removed by introducing hydrofluoric acid upstream of the dry pump while the processing chamber is idle. The hydrofluoric acid is introduced upstream of the dry pump through a nozzle in the foreline or at the inlet to the dry pump.

Abstract: The present invention relates to vacuum processing systems in which process gases are introduced in a process chamber and are exhausted through a vacuum processing system exhaust path. Deposits made by the exhausted gases in one or more dry vacuum pumps are removed by introducing hydrofluoric acid upstream of the dry pump while the processing chamber is idle. The hydrofluoric acid is introduced upstream of the dry pump through a nozzle in the foreline or at the inlet to the dry pump.