Abstract: The present invention relates to a photon counting X-ray detector and detection method that effectively suppress polarization even under high flux conditions.

Abstract: A height measurement apparatus comprising an array of differential pressure sensors, each differential pressure sensor comprising a reference outlet and a measurement outlet, the reference outlet being a predetermined distance from a reference surface, and each differential pressure sensor further comprising an inlet configured to provide pressurized gas for the reference outlet and the measurement outlet. A flexible membrane is positioned such that a reference side of the flexible membrane is in fluid communication with the reference outlet and a measurement side of the flexible membrane is in fluid communication with the measurement outlet. The flexible membrane is configured to move when a pressure change occurs at the measurement outlet and a detector is configured to monitor the movement of the flexible membrane.

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract: The invention relates to a detector (6) for detecting radiation, especially x-ray radiation used in a computed tomography system. The detector comprises a direct conversion material (9) for converting radiation into electrons and holes, which are used for generating an electrical detection signal. The direct conversion material is illuminated with illumination light being broadband visible and/or broadband infrared light for reducing, in particular, eliminating, a polarization of the direct conversion material, which may occur when being traversed by the radiation to be detected and which may reduce the detection performance. By reducing the polarization of the direct conversion material the detection performance can be improved.

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract: The invention relates to a detector (6) for detecting radiation, especially x-ray radiation used in a computed tomography system. The detector comprises a direct conversion material (9) for converting radiation into electrons and holes, which are used for generating an electrical detection signal. The direct conversion material is illuminated with illumination light being broadband visible and/or broadband infrared light for reducing, in particular, eliminating, a polarization of the direct conversion material, which may occur when being traversed by the radiation to be detected and which may reduce the detection performance. By reducing the polarization of the direct conversion material the detection performance can be improved.

Abstract: The present invention relates to a photon counting X-ray detector and detection method that effectively suppress polarization even under high flux conditions.

Abstract: The present invention relates to an apparatus (1) for applying energy to an object (2), wherein the apparatus (1) comprises an energy emitting element, a temperature sensor and a tube (6), in which the energy emitting element and the temperature sensor are locatable. The energy emitting elements is adapting for applying energy to the object (2) and the temperature sensor is adapted for sensing the temperature of the object (2). Both, the energy emitting element and the temperature sensor can be guided to a location of the object (2), at which the energy is to be applied.

Abstract: A MEMS scanning micromirror including a mirror body 50, the mirror body 50 having a rotation axis 58 with a pair of extension bars 56 parallel to the rotation axis 58; a frame 60 forming a mirror recess 62 with a recess periphery 64, the frame 60 having a pair of opposed frame bars 66 on the recess periphery 64 along the rotation axis 58; a pair of cantilever beam assemblies 70, each of the pair of cantilever beam assemblies 70 being fixed to one of the pair of opposed frame bars 66 and coupled to one end of the pair of extension bars 56; and a pair of vertical support beams 40 connected between each of the pair of opposed frame bars 66 to the mirror body 50 along the rotation axis 58.

Abstract: An electrostatic inkjet head providing high pressure to ink in order to enable high quality printing. The electrostatic actuator providing the pressure to the membrane (200) compressing the ink in a chamber (50) with an opening (20) is characterized by an overlapping area of the actuation electrode (300) and the moveable electrode (500) not determined by the area of the membrane (200) covering the chamber (50) with the ink. The maximum pressure that can be applied can be adapted by means of the ratio of the overlapping area (220) of the two electrodes and the area (210) of the membrane (200) covering the chamber (50) with the ink. Use of said head to eject a liquid drug used in an injection system.

Abstract: A fluid ejection device that can be used for inkjet heads is described. A large actuator with a small stroke in combination with hydraulic pressure transfer by means of essentially relatively incompressible fluid is used in order to generate a large stroke of a small membrane. Further the ink is ejected during the actuation phase of the actuator enabling a better control of the droplet dynamics.

Abstract: A MEMS scanning micromirror including a mirror body 50, the mirror body 50 having a rotation axis 58 with a pair of extension bars 56 parallel to the rotation axis 58; a frame 60 forming a mirror recess 62 with a recess periphery 64, the frame 60 having a pair of opposed frame bars 66 on the recess periphery 64 along the rotation axis 58; a pair of cantilever beam assemblies 70, each of the pair of cantilever beam assemblies 70 being fixed to one of the pair of opposed frame bars 66 and coupled to one end of the pair of extension bars 56; and a pair of vertical support beams 40 connected between each of the pair of opposed frame bars 66 to the mirror body 50 along the rotation axis 58.

Abstract: The present invention relates to an apparatus (1) for applying energy to an object (2), wherein the apparatus (1) comprises an energy emitting element, a temperature sensor and a tube (6), in which the energy emitting element and the temperature sensor are locatable. The energy emitting elements is adapting for applying energy to the object (2) and the temperature sensor is adapted for sensing the temperature of the object (2). Both, the energy emitting element and the temperature sensor can be guided to a location of the object (2), at which the energy is to be applied.

Abstract: An electrostatic inkjet head providing high pressure to ink in order to enable high quality printing. The electrostatic actuator providing the pressure to the membrane (200) compressing the ink in a chamber (50) with an opening (20) is characterized by an overlapping area of the actuation electrode (300) and the moveable electrode (500) not determined by the area of the membrane (200) covering the chamber (50) with the ink. The maximum pressure that can be applied can be adapted by means of the ratio of the overlapping area (220) of the two electrodes and the area (210) of the membrane (200) covering the chamber (50) with the ink. Use of said head to eject a liquid drug used in an injection system.

Abstract: In a lithographic proximity method for wiring an end or internal side surface of a substrate, the required exposure of strips, defining the wiring pattern, is performed by a mask having a diffraction structure to deflect exposure radiation to the side surface. An exposure beam, which is perpendicularly incident on the mask, is used so that enhanced tolerance for proximity gap width variations is obtained. The method allows manufacture of accurate and fine wiring.

Abstract: In a lithographic proximity method for wiring an end or internal side surface of a substrate the required exposure of strips (76), defining the wiring pattern, is performed by means of a mask (70) comprising a diffraction structure (74) to deflect exposure radiation (b) to the side surface. An exposure beam, which is perpendicularly incident on the mask, is used so that enhanced tolerance for proximity gap width variations is obtained. The method allows manufacture of accurate and fine wiring.

Abstract: A fluid ejection device that can be used for inkjet heads is described. A large actuator with a small stroke in combination with hydraulic pressure transfer by means of essentially relatively incompressible fluid is used in order to generate a large stroke of a small membrane. Further the ink is ejected during the actuation phase of the actuator enabling a better control of the droplet dynamics.

Abstract: The invention relates to a method for manufacturing a light emitting display comprising a plurality of light emitting elements on a substrate, wherein at least one delimiting means is provided on or over the substrate for at least partially bounding sites for deposition of a fluid light emitting substance to form the light emitting elements. At least a part of at least one of the delimiting means is repellent to the fluid light emitting substance. The repellent part may comprise a hydrophobic flow barrier. The method has the advantage of an enhanced resolution of light emitting elements, especially if the fluid light emitting substance is deposited by means of inkjet printing and involves different materials for generating different colours of light.

Abstract: The present invention relates to a micro fluidic device for analysis of a fluid sample, especially for molecular diagnostics applications, comprising: —a substrate having a surface with at least one micro channel structure thereon; —at least one detecting, controlling and/or processing element; —at least one reception chamber for receiving the fluid sample, wherein the reception chamber is formable between a membrane and the substrate, wherein the reception chamber is fluently connected with at least one micro channel; —at least one membrane, wherein the membrane covers the upper surface of at least one micro channel structure arranged on said substrate leakage proof, whereby movement of said membrane causes a pump action on fluid located in said reception chamber in said micro channel and/or causes a valve action on fluid directed through said micro channel; and—at least one device for actuating the movement of the membrane, comprising pressure and/or vacuum generating means.

Abstract: For the production of a SLM device, one mounts a spatial light modulator (SLM) (2) on a substrate (3) of the same material as the main material of the SLM (2) to be juxtaposed with the substrate (3). Particularly, silicon based SLMs (2) are mounted on a silicon substrate (3). This leads to arrays of SLMs (2) that maintain a high accuracy with respect to position of the SLMs (2) and planarity. To further improve the planarity, it is preferred to mount the SLMs (2) on the substrate (3) by soldering, using the self-aligning effect of solder connections (20).