Patents by Inventor Aravind Ratnam

Aravind Ratnam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser gas injection system
    Patent number: 7835414
    Abstract: A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the model and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern.
    Type: Grant
    Filed: April 25, 2007
    Date of Patent: November 16, 2010
    Assignee: Cymer, Inc.
    Inventors: Wayne J. Dunstan, Kevin M. O'Brien, Robert N. Jacques, Herve A. Besaucele, Aravind Ratnam
  • Laser gas injection system
    Publication number: 20080205472
    Abstract: A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the model and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern.
    Type: Application
    Filed: April 25, 2007
    Publication date: August 28, 2008
    Applicant: Cymer, Inc.
    Inventors: Wayne J. Dunstan, Kevin M. O'Brien, Robert N. Jacques, Herve A. Besaucele, Daniel J. Riggs, Aravind Ratnam