Patents by Inventor Arend-Jan Migchelbrink

Arend-Jan Migchelbrink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7295283
    Abstract: A lithographic apparatus for immersion lithography is described in which a compensation controller controls actuators to apply forces to the substrate equal in magnitude and opposite in direction to forces which are applied to the substrate by a liquid supply system which supplies liquid between the projection system and the substrate.
    Type: Grant
    Filed: April 2, 2004
    Date of Patent: November 13, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Henrikus Herman Marie Cox, Petrus Marinus Christianus Maria Van Den Biggelaar, Frits Van Der Meulen, Franciscus Andreas Cornelis Johannes Spanjers, Jan-Gerard Cornelis Van Der Toorn, Arend-Jan Migchelbrink
  • Lithographic apparatus and device manufacturing method
    Publication number: 20050219481
    Abstract: A lithographic apparatus for immersion lithography is described in which a compensation controller controls actuators to apply forces to the substrate equal in magnitude and opposite in direction to forces which are applied to the substrate by a liquid supply system which supplies liquid between the projection system and the substrate.
    Type: Application
    Filed: April 2, 2004
    Publication date: October 6, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Henrikus Herman Cox, Petrus Marinus Christianus Van Den Biggelaar, Frits Meulen, Franciscus Andreas Cornelis Spanjers, Jan-Gerard Van Der Toorn, Arend-Jan Migchelbrink