Patents by Inventor Arisa Oka

Arisa Oka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Structure, method for manufacturing the same, and talbot interferometer
    Patent number: 10045753
    Abstract: A structure includes a silicon substrate having a plurality of recessed portions, each recessed portion having a bottom and a side wall, silicide layers, each silicide layer in contact with the bottoms of the plurality of recessed portions, and a metal structure including metal portions, each metal portion disposed in the plurality of recessed portions and in contact with the silicide layers. The silicide layers are electrically connected to each other through the silicon substrate.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: August 14, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takayuki Teshima, Arisa Oka
  • STRUCTURE, METHOD FOR MANUFACTURING THE SAME, AND TALBOT INTERFEROMETER
    Publication number: 20160027546
    Abstract: A structure includes a silicon substrate having a plurality of recessed portions, each having a bottom and a side wall, silicide layers, one each in contact with the bottoms of the recessed portions, and a metal structure including metal portions, one each disposed in the recessed portions and in contact with the silicide layers. The silicide layers are electrically connected to each other through the silicon substrate.
    Type: Application
    Filed: July 21, 2015
    Publication date: January 28, 2016
    Inventors: Takayuki Teshima, Arisa Oka