Abstract: The subject invention uses a dither technique and a Discrete Fourier Transform to simultaneously align optical components along two axes orthogonal to the optic axis. The dither technique and the magnitude of the transmitted light are used to detect the misalignment in both directions simultaneously, and the Discrete Fourier Transform is used to detect the size and direction of the misalignment.

Abstract: The present invention includes a system for monitoring surface structures on a planar surface utilizing a radiation source emitting a beam. The planar surface has various surface structure types, including a plurality of grooves therein which intersect at various angles which are equal to or less than a predetermined maximum angle. The system includes an apparatus for directing the beam to the planar surface along an optical axis perpendicular to the planar surface resulting in radiation being scattered from the planar surface and a reference beam being specularly reflected from the planar surface. The system also includes detector responsive to radiation scattered from the planar surface. This detector produces a first signal representative thereof.

Abstract: The burnishing tool has a plurality of holes in the planar surface which engages the flexible magnetic disk. Each hole contains a burnishing blade positioned at 45.degree. to the direction of motion. A manifold connects each hole to a vacuum pump which draws air into the holes causing the flexible magnetic disk to fly against the planar surface. The vacuum also removes the debris from the burnishing tool.