Patents by Inventor Armin T. Tilke

Armin T. Tilke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR REMOVING MATERIAL FROM A SEMICONDUCTOR
    Publication number: 20080233709
    Abstract: A method for removing a material from a trench in a semiconductor. The method includes placing the semiconductor in a vacuum chamber, admitting a reactant into the chamber at a pressure to form a film of the reactant on a surface of the material, controlling the composition and residence time of the film on the surface of the material to etch at least a portion of the material, and removing any unwanted reactant and reaction product from the chamber or the surface of the material.
    Type: Application
    Filed: March 22, 2007
    Publication date: September 25, 2008
    Applicants: Infineon Technologies North America Corp., International Business Machines
    Inventors: Richard Anthony Conti, Armin T. Tilke, Chris Stapelmann, Michael R. Sievers