Patents by Inventor Arnd Kaelberer

Arnd Kaelberer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micromechanical switch
    Publication number: 20050173233
    Abstract: A micromechanical switch having a mass, a first spring element, and a contact element is provided. The mass contacts the contact element if a specified degree of displacement of the first spring element is exceeded.
    Type: Application
    Filed: February 25, 2003
    Publication date: August 11, 2005
    Applicant: Robert Bosch GmbH
    Inventor: Arnd Kaelberer
  • Method for reducing the adhesive properties of MEMS and anti-adhesion-coated device
    Publication number: 20050118742
    Abstract: A method provides coating of the surface of a microelectromechanical structure (MEMS) wafer by using an anti-stick layer. The anti-stick material is initially applied to a cap wafer, and in subsequent steps this seeded cap wafer is bonded to the MEMS wafer. The anti-stick material is evaporated and deposited at least on parts of the surfaces of the MEMS wafer.
    Type: Application
    Filed: October 28, 2004
    Publication date: June 2, 2005
    Inventors: Frank Henning, Lutz Mueller, Holger Hoefer, Arnd Kaelberer