Patents by Inventor Arnold Kolandenko

Arnold Kolandenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma assisted processing chamber with separate control of species density
    Patent number: 6352049
    Abstract: The present invention provides an apparatus and method, for plasma assisted processing of a workpiece, which provides for separate control of species density within a processing plasma. The present invention has a processing chamber and at least one collateral chamber. The collateral chamber is capable of generating a collateral plasma and delivering it to the processing chamber. To control the densities of the particle species within the processing chamber the present invention may have: a filter interposed between the collateral chamber and the processing chamber, primary chamber source power, several collateral chambers providing separate inputs to the processing chamber, or combinations thereof. Collateral plasma may be: filtered, combined with primary chamber generated plasma, combined with another collateral plasma, or combinations thereof to separately control the densities of the species comprising the processing plasma.
    Type: Grant
    Filed: July 20, 1998
    Date of Patent: March 5, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Gerald Yin, Arnold Kolandenko, Hong Ching Shan, Peter Loewenhardt, Chii Lee, Yan Ye, Xueyan Qian, Songlin Xu, Arthur Chen, Arthur Sato, Michael Grimbergen, Diana Ma, John Yamartino, Chun Yan, Wade Zawalski