Patents by Inventor Arnon Mizrahy

Arnon Mizrahy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection
    Patent number: 10541104
    Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: January 21, 2020
    Assignee: Applied Materials Israel Ltd.
    Inventors: Uri Lev, Alon Litman, Zvi Nir, Arnon Mizrahy
  • SYSTEM AND METHOD FOR SCANNING AN OBJECT WITH AN ELECTRON BEAM
    Publication number: 20170011883
    Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.
    Type: Application
    Filed: July 9, 2015
    Publication date: January 12, 2017
    Inventors: Uri Lev, Alon Litman, Zvi Nir, Arnon Mizrahy