Patents by Inventor Arpan P. Mahorowala
Arpan P. Mahorowala has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9059000Abstract: Increased protection of areas of a chip are provided by both a mask structure of increased robustness in regard to semiconductor manufacturing processes or which can be removed with increased selectivity and controllability in regard to underlying materials, or both. Mask structures are provided which exhibit an interface of a chemical reaction, grain or material type which can be exploited to enhance either or both types of protection. Structures of such masks include TERA material which can be converted or hydrated and selectively etched using a mixture of hydrogen fluoride and a hygroscopic acid or organic solvent, and two layer structures of similar or dissimilar materials.Type: GrantFiled: April 21, 2008Date of Patent: June 16, 2015Assignee: International Business Machines CorporationInventors: Deok-kee Kim, Kenneth T. Settlemyer, Jr., Kangguo Cheng, Ramachandra Divakaruni, Carl J. Radens, Dirk Pfeiffer, Timothy Dalton, Katherina Babich, Arpan P. Mahorowala, Harald Okorn-Schmidt
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Patent number: 8609322Abstract: A lithographic structure comprising: an organic antireflective material disposed on a substrate, and a silicon antireflective material disposed on the organic antireflective material. The silicon antireflective material comprises a crosslinked polymer with a SiOx backbone, a chromophore, and a transparent organic group that is substantially transparent to 193 nm or 157 nm radiation. In combination, the organic antireflective material and the silicon antireflective material provide an antireflective material suitable for deep ultraviolet lithography. The invention is also directed to a process of making the lithographic structure.Type: GrantFiled: September 14, 2012Date of Patent: December 17, 2013Assignee: International Business Machines CorporationInventors: Marie Angelopoulos, Katherina E. Babich, Sean D. Burns, Allen H. Gabor, Scott D. Halle, Arpan P. Mahorowala, Dirk Pfeiffer
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Publication number: 20130017486Abstract: A lithographic structure comprising: an organic antireflective material disposed on a substrate, and a silicon antireflective material disposed on the organic antireflective material. The silicon antireflective material comprises a crosslinked polymer with a SiOx backbone, a chromophore, and a transparent organic group that is substantially transparent to 193 nm or 157 nm radiation. In combination, the organic antireflective material and the silicon antireflective material provide an antireflective material suitable for deep ultraviolet lithography. The invention is also directed to a process of making the lithographic structure.Type: ApplicationFiled: September 14, 2012Publication date: January 17, 2013Applicant: International Business Machines CorporationInventors: Marie Angelopoulos, Katherina E. Babich, Sean D. Burns, Allen H. Gabor, Scott D. Halle, Arpan P. Mahorowala, Dirk Pfeiffer
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Patent number: 8293454Abstract: A lithographic structure comprising: an organic antireflective material disposed on a substrate; and a silicon antireflective material disposed on the organic antireflective material. The silicon antireflective material comprises a crosslinked polymer with a SiOx backbone, a chromophore, and a transparent organic group that is substantially transparent to 193 nm or 157 nm radiation. In combination, the organic antireflective material and the silicon antireflective material provide an antireflective material suitable for deep ultraviolet lithography. The invention is also directed to a process of making the lithographic structure.Type: GrantFiled: November 18, 2008Date of Patent: October 23, 2012Assignee: International Business Machines CorporationInventors: Marie Angelopoulos, Katherina E. Babich, Sean D. Burns, Allen H. Gabor, Scott D. Halle, Arpan P. Mahorowala, Dirk Pfeiffer
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Patent number: 7968270Abstract: A lithographic structure consisting essentially of: an organic antireflective material disposed on a substrate; a vapor-deposited RCHX material, wherein R is one or more elements selected from the group consisting of Si, Ge, B, Sn, Fe and Ti, and wherein X is not present or is one or more elements selected from the group consisting of O, N, S and F; and a photoresist material disposed on the RCHX material. The invention is also directed to methods of making the lithographic structure, and using the structure to pattern a substrate.Type: GrantFiled: August 25, 2008Date of Patent: June 28, 2011Assignee: International Business Machines CorporationInventors: Marie Angelopoulos, Katherina E. Babich, Sean D. Burns, Richard A. Conti, Allen H. Gabor, Scott D. Halle, Arpan P. Mahorowala, Dirk Pfeiffer
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Patent number: 7648820Abstract: Antireflective hardmask compositions and techniques for the use of antireflective hardmask compositions for processing of semiconductor devices are provided. In one aspect of the invention, an antireflective hardmask layer for lithography is provided. The antireflective hardmask layer comprises a carbosilane polymer backbone comprising at least one chromophore moiety and at least one transparent moiety; and a crosslinking component. In another aspect of the invention, a method for processing a semiconductor device is provided. The method comprises the steps of: providing a material layer on a substrate; forming an antireflective hardmask layer over the material layer. The antireflective hardmask layer comprises a carbosilane polymer backbone comprising at least one chromophore moiety and at least one transparent moiety; and a crosslinking component.Type: GrantFiled: December 21, 2006Date of Patent: January 19, 2010Assignee: International Business Machines CorporationInventors: Katherina Babich, Elbert Huang, Arpan P. Mahorowala, David R. Medeiros, Dirk Pfeiffer, Karen Temple
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Patent number: 7545041Abstract: Techniques for semiconductor processing are provided. In one aspect, a method for patterning one or more features in a semiconductor device comprises the following step. At least one critical dimension of the one or more features is reduced during etching of the antireflective material. A lithographic structure is also provided.Type: GrantFiled: January 23, 2006Date of Patent: June 9, 2009Assignee: International Business Machines CorporationInventors: Scott D. Allen, Katherina E. Babich, Steven J. Holmes, Arpan P. Mahorowala, Dirk Pfeiffer, Richard Stephan Wise
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Publication number: 20090061355Abstract: A lithographic structure comprising: an organic antireflective material disposed on a substrate; and a silicon antireflective material disposed on the organic antireflective material. The silicon antireflective material comprises a crosslinked polymer with a SiOx backbone, a chromophore, and a transparent organic group that is substantially transparent to 193 nm or 157 nm radiation. In combination, the organic antireflective material and the silicon antireflective material provide an antireflective material suitable for deep ultraviolet lithography. The invention is also directed to a process of making the lithographic structure.Type: ApplicationFiled: November 18, 2008Publication date: March 5, 2009Applicant: International Business Machines CorporationInventors: Marie Angelopoulos, Katherina E. Babich, Sean D. Burns, Allen H. Gabor, Scott D. Halle, Arpan P. Mahorowala, Dirk Pfeiffer
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Patent number: 7497959Abstract: Increased protection of areas of a chip are provided by both a mask structure of increased robustness in regard to semiconductor manufacturing processes or which can be removed with increased selectivity and controllability in regard to underlying materials, or both. Mask structures are provided which exhibit an interface of a chemical reaction, grain or material type which can be exploited to enhance either or both types of protection. Structures of such masks include TERA material which can be converted or hydrated and selectively etched using a mixture of hydrogen fluoride and a hygroscopic acid or organic solvent, and two layer structures of similar or dissimilar materials.Type: GrantFiled: May 11, 2004Date of Patent: March 3, 2009Assignee: International Business Machines CorporationInventors: Deok-kee Kim, Kenneth T. Settlemyer, Jr., Kangguo Cheng, Ramachandra Divakaruni, Carl J. Radens, Dirk Pfeiffer, Timothy Dalton, Katherina Babich, Arpan P. Mahorowala, Harald Okorn-Schmidt
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Patent number: 7485573Abstract: A lithographic structure consisting essentially of: an organic antireflective material disposed on a substrate; a vapor-deposited RCHX material, wherein R is one or more elements selected from the group consisting of Si, Ge, B, Sn, Fe and Ti, and wherein X is not present or is one or more elements selected from the group consisting of O, N, S and F; and a photoresist material disposed on the RCHX material. The invention is also directed to methods of making the lithographic structure, and using the structure to pattern a substrate.Type: GrantFiled: February 17, 2006Date of Patent: February 3, 2009Assignee: International Business Machines CorporationInventors: Marie Angelopoulos, Katherina E. Babich, Sean D. Burns, Richard A. Conti, Allen H. Gabor, Scott D. Halle, Arpan P. Mahorowala, Dirk Pfeiffer
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Publication number: 20080311508Abstract: A lithographic structure consisting essentially of: an organic antireflective material disposed on a substrate; a vapor-deposited RCHX material, wherein R is one or more elements selected from the group consisting of Si, Ge, B, Sn, Fe and Ti, and wherein X is not present or is one or more elements selected from the group consisting of O, N, S and F; and a photoresist material disposed on the RCHX material. The invention is also directed to methods of making the lithographic structure, and using the structure to pattern a substrate.Type: ApplicationFiled: August 25, 2008Publication date: December 18, 2008Applicant: INTERNATION BUSINESS MACHINES CORPORATIONInventors: Marie Angelopoulos, Katherina E. Babich, Sean D. Burns, Richard A. Conti, Allen H. Gabor, Scott D. Halle, Arpan P. Mahorowala, Dirk Pfeiffer
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Publication number: 20080261128Abstract: Increased protection of areas of a chip are provided by both a mask structure of increased robustness in regard to semiconductor manufacturing processes or which can be removed with increased selectivity and controllability in regard to underlying materials, or both. Mask structures are provided which exhibit an interface of a chemical reaction, grain or material type which can be exploited to enhance either or both types of protection. Structures of such masks include TERA material which can be converted or hydrated and selectively etched using a mixture of hydrogen fluoride and a hygroscopic acid or organic solvent, and two layer structures of similar or dissimilar materials.Type: ApplicationFiled: April 21, 2008Publication date: October 23, 2008Inventors: Deok-kee Kim, Kenneth T. Settlemyer, Kangguo Cheng, Ramachandra Divakaruni, Carl J. Radens, Dirk Pfeiffer, Thimothy Dalton, Katherina Babich, Arpan P. Mahorowala, Harald Okorn-Schmidt
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Publication number: 20080187731Abstract: Techniques for semiconductor processing are provided. In one aspect, a method for patterning one or more features in a semiconductor device comprises the following step. At least one critical dimension of the one or more features is reduced during etching of the antireflective material. A lithographic structure is also provided.Type: ApplicationFiled: April 3, 2008Publication date: August 7, 2008Applicant: International Business Machines CorporationInventors: Scott D. Allen, Katherina E. Babich, Steven J. Holmes, Arpan P. Mahorowala, Dirk Pfeiffer, Richard Stephan Wise
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Publication number: 20080128388Abstract: A method for etching an organic anti-reflective coating (ARC) layer on a substrate in a plasma processing system comprising: introducing a process gas comprising ammonia (NH3), and a passivation gas; forming a plasma from the process gas; and exposing the substrate to the plasma. The process gas can, for example, constitute NH3 and a hydrocarbon gas such as at least one of C2H4, CH4, C2H2, C2H6, C3H4, C3H6, C3H8, C4H6, C4H8, C4H10, C5H8, C5H10, C6H6, C6H10, and C6H12. Additionally, the process chemistry can further comprise the addition of helium. The present invention further presents a method for forming a bilayer mask for etching a thin film on a substrate, wherein the method comprises: forming the thin film on the substrate; forming an ARC layer on the thin film; forming a photoresist pattern on the ARC layer; and transferring the photoresist pattern to the ARC layer with an etch process using a process gas comprising ammonia (NH3), and a passivation gas.Type: ApplicationFiled: January 7, 2008Publication date: June 5, 2008Applicant: TOKYO ELECTRON LIMITEDInventors: Vaidyanathan BALASUBRAMANIAM, Koichiro INAZAWA, Rie INAZAWA, Rich WISE, Arpan P. MAHOROWALA, Siddhartha PANDA
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Patent number: 7326442Abstract: An antireflective composition and a lithographic structure comprising a silicon-metal oxide, antireflective material derived from the composition. The antireflective composition comprises a polymer of formula I, wherein 1?x?2; 1?y?5; 1?0; m>0; n>0; R is a chromophore, M is a metal selected from Group IIIB to Group VIB, lanthanides, Group IIIA, Group IVA except silicon; and L is an optional ligand. The invention is also directed to a process of making a lithographic structure including a silicon-metal oxide, antireflective material.Type: GrantFiled: July 14, 2005Date of Patent: February 5, 2008Assignee: International Business Machines CorporationInventors: Katherina E. Babich, Sean D. Burns, Elbert E. Huang, Arpan P. Mahorowala, Dirk Pfeiffer, Karen Temple
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Patent number: 7223517Abstract: Compositions and techniques for the processing of semiconductor devices are provided. In one aspect of the invention, an antireflective hardmask composition is provided. The composition comprises a fully condensed polyhedral oligosilsesquioxane, {RSiO1.5}n, wherein n equals 8; and at least one chromophore moiety and transparent moiety. In another aspect of the invention, a method for processing a semiconductor device is provided. The method comprises the steps of: providing a material layer on a substrate; forming an antireflective hardmask layer over the material layer. The antireflective hardmask layer comprises a fully condensed polyhedral oligosilsesquioxane, {RSiO1.5}n, wherein n equals 8; and at least one chromophore moiety and transparent moiety.Type: GrantFiled: August 5, 2003Date of Patent: May 29, 2007Assignee: International Business Machines CorporationInventors: Katherina Babich, Arpan P. Mahorowala, David R. Medeiros, Dirk Pfeiffer
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Patent number: 7175966Abstract: A multilayer lithographic structure which includes a substrate, having on a major surface thereof a first layer including a water and/or aqueous base soluble material which includes Ge, O, and H, and optionally X, wherein X is at least one of Si, N, and F; and disposed on the first layer a second layer which includes an energy photoactive material.Type: GrantFiled: September 19, 2003Date of Patent: February 13, 2007Assignee: International Business Machines CorporationInventors: Katherina E Babich, Alfred Grill, Arpan P Mahorowala, Dirk P Pfeiffer
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Patent number: 7172849Abstract: Antireflective hardmask compositions and techniques for the use of antireflective hardmask compositions for processing of semiconductor devices are provided. In one aspect of the invention, an antireflective hardmask layer for lithography is provided. The antireflective hardmask layer comprises a carbosilane polymer backbone comprising at least one chromophore moiety and at least one transparent moiety; and a crosslinking component. In another aspect of the invention, a method for processing a semiconductor device is provided. The method comprises the steps of: providing a material layer on a substrate; forming an antireflective hardmask layer over the material layer. The antireflective hardmask layer comprises a carbosilane polymer backbone comprising at least one chromophore moiety and at least one transparent moiety; and a crosslinking component.Type: GrantFiled: August 22, 2003Date of Patent: February 6, 2007Assignee: International Business Machines CorporationInventors: Katherina Babich, Elbert Huang, Arpan P. Mahorowala, David R. Medeiros, Dirk Pfeiffer, Karen Temple
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Patent number: 7172969Abstract: A method and system is described for preparing a film stack, and forming a feature in the film stack using a plurality of dry etching processes. The feature formed in the film stack can include a gate structure having a critical dimension of approximately 25 nm or less. This critical dimension can be formed in the polysilicon layer using four mask layers.Type: GrantFiled: August 26, 2004Date of Patent: February 6, 2007Assignees: Tokyo Electron Limited, International Business Machines CorporationInventors: Annie Xia, Hiromasa Mochiki, Arpan P Mahorowala
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Patent number: 7077903Abstract: Methods for generating a nanostructure and for enhancing etch selectivity, and a nanostructure are disclosed. The invention implements a tunable etch-resistant anti-reflective (TERA) material integration scheme which gives high etch selectivity for both etching pattern transfer through the TERA layer (used as an ARC and/or hardmask) with etch selectivity to the patterned photoresist, and etching to pattern transfer through a dielectric layer of nitride. This is accomplished by oxidizing a TERA layer after etching pattern transfer through the TERA layer to form an oxidized TERA layer having chemical properties similar to oxide. The methods provide all of the advantages of the TERA material and allows for high etch selectivity (approximately 5–10:1) for etching to pattern transfer through nitride. In addition, the methodology reduces LER and allows for trimming despite reduced photoresist thickness.Type: GrantFiled: November 10, 2003Date of Patent: July 18, 2006Assignee: International Business Machines CorporationInventors: Katherina E. Babich, Scott D. Halle, David V. Horak, Arpan P. Mahorowala, Wesley C. Natzle, Dirk Pfeiffer, Hongwen Yan