Patents by Inventor Arthur Lam

Arthur Lam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8563202
    Abstract: A method for stitching a first field mask to a second field mask on a wafer includes providing a photomask with a first set of targets and a second set of targets, printing images of the first set of targets and the second set of targets onto the wafer where the photomask is applied to the wafer having no previous alignment marks formed thereon for the photomask to align to. A first set of alignment marks is formed from the first set of targets and a second set of alignment marks is formed from the second set of targets. The method includes aligning a first field mask to the first set of alignment marks and aligning a second field mask to the second set of alignment marks. The images of the first field mask and the second field mask are thereby stitched together on the wafer.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: October 22, 2013
    Assignee: Micrel, Inc.
    Inventor: Arthur Lam
  • Publication number: 20130236835
    Abstract: A method for stitching a first field mask to a second field mask on a wafer includes providing a photomask with a first set of targets and a second set of targets, printing images of the first set of targets and the second set of targets onto the wafer where the photomask is applied to the wafer having no previous alignment marks formed thereon for the photomask to align to. A first set of alignment marks is formed from the first set of targets and a second set of alignment marks is formed from the second set of targets. The method includes aligning a first field mask to the first set of alignment marks and aligning a second field mask to the second set of alignment marks. The images of the first field mask and the second field mask are thereby stitched together on the wafer.
    Type: Application
    Filed: April 17, 2013
    Publication date: September 12, 2013
    Applicant: Micrel, Inc.
    Inventor: Arthur Lam
  • Patent number: 8440372
    Abstract: A single field photomask includes a first set of targets formed on a first side of the photomask, and a second set of targets formed on a second side of the photomask, opposite the first side. In operation, the photomask is to be applied to a wafer without any alignment marks. The photomask forms a first set of alignment marks in the wafer from the first set of targets, and the photomask further forms a second set of alignment marks in the wafer from the second set of targets. The first set of alignment marks is used to align to a first field mask and the second set of alignment marks is used to align to a second field mask to stitch an image of the first field mask to an image of the second field mask.
    Type: Grant
    Filed: February 3, 2011
    Date of Patent: May 14, 2013
    Assignee: Micrel, Inc.
    Inventor: Arthur Lam
  • Publication number: 20120202138
    Abstract: A single field photomask includes a first set of targets formed on a first side of the photomask, and a second set of targets formed on a second side of the photomask, opposite the first side. In operation, the photomask is to be applied to a wafer without any alignment marks. The photomask forms a first set of alignment marks in the wafer from the first set of targets, and the photomask further forms a second set of alignment marks in the wafer from the second set of targets. The first set of alignment marks is used to align to a first field mask and the second set of alignment marks is used to align to a second field mask to stitch an image of the first field mask to an image of the second field mask.
    Type: Application
    Filed: February 3, 2011
    Publication date: August 9, 2012
    Applicant: MICREL, INC.
    Inventor: Arthur Lam
  • Publication number: 20090130813
    Abstract: A system and method in accordance with the present invention allows for an improved oxide integrity of a polysilicon capacitor compared to capacitors manufactured using conventional semiconductor processing techniques. This is accomplished by moving the capacitor implant step to a time after the deposition of the polysilicon. As an additional benefit, a separate capacitor oxide growth does not need to be performed.
    Type: Application
    Filed: November 20, 2007
    Publication date: May 21, 2009
    Applicant: Micrel, Inc.
    Inventor: Arthur Lam
  • Publication number: 20060230459
    Abstract: System and methods for password protecting an attribute of content transmitted over a network. Content such as a text file, an audio file, a video file, and the like, sent over a network is protected by a password. A sender setting up the protection may determine which attribute of the content is to be protected by the password. Attributes that may be protected include time to access, number of accesses, permission to forward, permission to store, and the like. In a time to view example, the received content may self-destruct unless the receiver enters the password within a specified time period. Protection may be set up such that every time the receiver attempts to access the content, the password has to be re-entered. Access by an unauthorized user who may have possession of the computing device with the received content is prevented by content level protection.
    Type: Application
    Filed: March 29, 2005
    Publication date: October 12, 2006
    Applicant: Microsoft Corporation
    Inventor: Arthur Lam
  • Patent number: 6762434
    Abstract: A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The serpentine line runs between the interdigitated tines of the first metal comb and the second metal comb. The test structure pattern forms a first metal comb, a second metal comb, and a serpentine metal line on a die. Print quality and resolution is tested by checking for electrical continuity in the serpentine metal line and bridging between the serpentine metal line and one of the first metal comb and the second metal comb.
    Type: Grant
    Filed: April 23, 2003
    Date of Patent: July 13, 2004
    Assignee: Micrel, Inc.
    Inventors: Robert W. Rumsey, Hiu F Ip, Arthur Lam
  • Patent number: 6649932
    Abstract: A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The serpentine line runs between the interdigitated tines of the first metal comb and the second metal comb. The test structure pattern forms a first metal comb, a second metal comb, and a serpentine metal line on a die. Print quality and resolution is tested by checking for electrical continuity in the serpentine metal line and bridging between the serpentine metal line and one of the first metal comb and the second metal comb.
    Type: Grant
    Filed: April 1, 2002
    Date of Patent: November 18, 2003
    Assignee: Micrel, Inc.
    Inventors: Robert W. Rumsey, Hui F Ip, Arthur Lam
  • Publication number: 20030210058
    Abstract: A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The serpentine line runs between the interdigitated tines of the first metal comb and the second metal comb. The test structure pattern forms a first metal comb, a second metal comb, and a serpentine metal line on a die. Print quality and resolution is tested by checking for electrical continuity in the serpentine metal line and bridging between the serpentine metal line and one of the first metal comb and the second metal comb.
    Type: Application
    Filed: April 23, 2003
    Publication date: November 13, 2003
    Inventors: Robert W. Rumsey, Hiu F. Ip, Arthur Lam
  • Publication number: 20030186473
    Abstract: A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The serpentine line runs between the interdigitated tines of the first metal comb and the second metal comb. The test structure pattern forms a first metal comb, a second metal comb, and a serpentine metal line on a die. Print quality and resolution is tested by checking for electrical continuity in the serpentine metal line and bridging between the serpentine metal line and one of the first metal comb and the second metal comb.
    Type: Application
    Filed: April 1, 2002
    Publication date: October 2, 2003
    Inventors: Robert W. Rumsey, Hiu F. Ip, Arthur Lam