Patents by Inventor Arthur Pitera
Arthur Pitera has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11886110Abstract: An imprinting apparatus includes a silicon master and an anti-stick layer coating the silicon master. The silicon master includes a plurality of features positioned at an average pitch of less than about 425 nm, each of the plurality of features comprises a depression having an opening with its largest opening dimension being less than about 300 nm. The anti-stick layer includes a crosslinked silane polymer network.Type: GrantFiled: March 23, 2021Date of Patent: January 30, 2024Assignee: Illumina, Inc.Inventors: Timothy J. Merkel, Ruibo Wang, Daniel Wright, Danny Yuan Chan, Avishek Aiyar, Tanmay Ghonge, Neil Brahma, Arthur Pitera
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Patent number: 11442017Abstract: An inspection apparatus is provided that comprises an optical target including a solid host material and a fluorescing material embedded in the solid host material. The solid host material has a predetermined phonon energy HOSTPE. The fluorescing material exhibits a select ground energy level and a target excitation (TE) energy level separated from the ground energy level by a first energy gap corresponding to a fluorescence emission wavelength of interest. The fluorescing material has a next lower lying (NLL) energy level relative to the TE energy level. The NLL energy level is spaced a second energy gap FMEG2 below the TE energy level, wherein a ratio of the FMEG2/HOSTPE is three or more.Type: GrantFiled: November 4, 2020Date of Patent: September 13, 2022Assignee: ILLUMINA, INC.Inventors: John Gerhardt Earney, Joseph Francis Pinto, M. Shane Bowen, Michael S. Graige, Arthur Pitera, Bala Murali K. Venkatesan, Dajun Yuan
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Publication number: 20210302832Abstract: An imprinting apparatus includes a silicon master and an anti-stick layer coating the silicon master. The silicon master includes a plurality of features positioned at an average pitch of less than about 425 nm, each of the plurality of features comprises a depression having an opening with its largest opening dimension being less than about 300 nm. The anti-stick layer includes a crosslinked silane polymer network.Type: ApplicationFiled: March 23, 2021Publication date: September 30, 2021Inventors: Timothy J. Merkel, Ruibo Wang, Daniel Wright, Danny Yuan Chan, Avishek Aiyar, Tanmay Ghonge, Neil Brahma, Arthur Pitera
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Publication number: 20210055224Abstract: An inspection apparatus is provided that comprises an optical target including a solid host material and a fluorescing material embedded in the solid host material. The solid host material has a predetermined phonon energy HOSTPE. The fluorescing material exhibits a select ground energy level and a target excitation (TE) energy level separated from the ground energy level by a first energy gap corresponding to a fluorescence emission wavelength of interest. The fluorescing material has a next lower lying (NLL) energy level relative to the TE energy level. The NLL energy level is spaced a second energy gap FMEG2 below the TE energy level, wherein a ratio of the FMEG2/HOSTPE is three or more.Type: ApplicationFiled: November 4, 2020Publication date: February 25, 2021Inventors: John Gerhardt Earney, Joseph Francis Pinto, M. Shane Bowen, Michael S. Graige, Arthur Pitera, Bala Murali K. Venkatesan, Dajun Yuan
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Patent number: 10830700Abstract: An inspection apparatus is provided that comprises an optical target including a solid host material and a fluorescing material embedded in the solid host material. The solid host material has a predetermined phonon energy HOSTPE. The fluorescing material exhibits a select ground energy level and a target excitation (TE) energy level separated from the ground energy level by a first energy gap corresponding to a fluorescence emission wavelength of interest. The fluorescing material has a next lower lying (NLL) energy level relative to the TE energy level. The NLL energy level is spaced a second energy gap FMEG2 below the TE energy level, wherein a ratio of the FMEG2/HOSTPE is three or more.Type: GrantFiled: March 1, 2019Date of Patent: November 10, 2020Assignee: ILLUMINA, INC.Inventors: John Gerhardt Earney, Joseph Francis Pinto, M. Shane Bowen, Michael S. Graige, Arthur Pitera, Bala Murali K. Venkatesan, Dajun Yuan
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Publication number: 20190195799Abstract: An inspection apparatus is provided that comprises an optical target including a solid host material and a fluorescing material embedded in the solid host material. The solid host material has a predetermined phonon energy HOSTPE. The fluorescing material exhibits a select ground energy level and a target excitation (TE) energy level separated from the ground energy level by a first energy gap corresponding to a fluorescence emission wavelength of interest. The fluorescing material has a next lower lying (NLL) energy level relative to the TE energy level. The NLL energy level is spaced a second energy gap FMEG2 below the TE energy level, wherein a ratio of the FMEG2/HOSTPE is three or more.Type: ApplicationFiled: March 1, 2019Publication date: June 27, 2019Inventors: John Gerhardt Earney, Joseph Francis Pinto, M. Shane Bowen, Michael S. Graige, Arthur Pitera, Bala Murali K. Venkatesan, Dajun Yuan
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Patent number: 10261018Abstract: An inspection apparatus is provided that comprises an optical target including a solid host material and a fluorescing material embedded in the solid host material. The solid host material has a predetermined phonon energy HOSTPE. The fluorescing material exhibits a select ground energy level and a target excitation (TE) energy level separated from the ground energy level by a first energy gap corresponding to a fluorescence emission wavelength of interest. The fluorescing material has a next lower lying (NLL) energy level relative to the TE energy level. The NLL energy level is spaced a second energy gap FMEG2 below the TE energy level, wherein a ratio of the FMEG2/HOSTPE is three or more.Type: GrantFiled: December 11, 2017Date of Patent: April 16, 2019Assignee: ILLUMINA, INC.Inventors: John Gerhardt Earney, Joseph Francis Pinto, M. Shane Bowen, Michael S. Graige, Arthur Pitera, Bala Murali K. Venkatesan, Dajun A. Yuan
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Publication number: 20180195961Abstract: An inspection apparatus is provided that comprises an optical target including a solid host material and a fluorescing material embedded in the solid host material. The solid host material has a predetermined phonon energy HOSTPE. The fluorescing material exhibits a select ground energy level and a target excitation (TE) energy level separated from the ground energy level by a first energy gap corresponding to a fluorescence emission wavelength of interest. The fluorescing material has a next lower lying (NLL) energy level relative to the TE energy level. The NLL energy level is spaced a second energy gap FMEG2 below the TE energy level, wherein a ratio of the FMEG2/HOSTPE is three or more.Type: ApplicationFiled: December 11, 2017Publication date: July 12, 2018Inventors: John Gerhardt Earney, Joseph Francis Pinto, M. Shane Bowen, Michael S. Graige, Arthur Pitera, Bala Murali K. Venkatesan, Dajun A. Yuan
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Publication number: 20060073674Abstract: A method and structure for forming semiconductor structures using tensilely strained gettering layers. The method includes forming a donor wafer comprising a tensilely strained gettering layer disposed over a substrate, and at least one material layer disposed over the tensilely strained gettering layer. Additionally, the donor wafer may possess a particle-confining region proximate the tensilely strained layer. The method also includes introducing particles into the donor wafer to a depth below the surface, and accumulating at least some particles within the tensilely strained gettering layer. Next, the method includes initiating a cleaving action so as to separate at least one of the material layers form the substrate. The tensilely strained gettering layer may accumulate particles and/or point defects and reduce the implantation dose and thermal budget required for cleaving.Type: ApplicationFiled: October 1, 2004Publication date: April 6, 2006Applicant: Massachusetts Institute of TechnologyInventors: Eugene Fitzgerald, Arthur Pitera