Abstract: A probe device is disclosed that includes one or more insulating layers and a glassy carbon layer. The glassy carbon layer includes one or more channels. Each channel includes a microstructure, which may include an electrode region, interconnect region, and bump pad region. The electrode region may be placed in contact with a human or animal patient or test subject and used to collect or deliver signals in applications such as electrocorticography (ECoG), electromyography (EMG), and neural stimulation. A method of making a probe includes depositing a glassy carbon precursor on a substrate, patterning the precursor using photolithography, pyrolyzing the precursor to allow the formation of glassy carbon, and depositing one or more insulating layers.

Abstract: A probe device is disclosed that includes one or more insulating layers and a glassy carbon layer. The glassy carbon layer includes one or more channels. Each channel includes a microstructure, which may include an electrode region, interconnect region, and bump pad region. The electrode region may be placed in contact with a human or animal patient or test subject and used to collect or deliver signals in applications such as electrocorticography (ECoG), electromyography (EMG), and neural stimulation. A method of making a probe includes depositing a glassy carbon precursor on a substrate, patterning the precursor using photolithography, pyrolyzing the precursor to allow the formation of glassy carbon, and depositing one or more insulating layers.