Patents by Inventor Atsunobu Ohkuba

Atsunobu Ohkuba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Susceptor for vapor deposition
    Patent number: 5456757
    Abstract: A novel susceptor used in a chemical vapor deposition device that is made of a ceramic material, specifically, an aluminum nitride material.
    Type: Grant
    Filed: October 29, 1993
    Date of Patent: October 10, 1995
    Assignee: Applied Materials, Inc.
    Inventors: Michio Aruga, Atsunobu Ohkuba, Akihiko Saito, Katsumasa Anan