Abstract: A plasma generating electrode includes two types of plate-shaped unit electrodes of different polarities, the two types of unit electrodes of different polarities being hierarchically and alternately stacked at specific intervals, a discharge space for generating plasma being formed between the opposing unit electrodes, each of the unit electrodes of one polarity among the two types of unit electrodes of different polarities including a plate-shaped conductor exhibiting conductivity and a ceramic dielectric disposed to cover the conductor, the ceramic dielectric of the unit electrode of one polarity including a support protrusion for forming the discharge space for generating plasma between the opposing unit electrodes and at least a part of a space in which the unit electrode of the other polarity is disposed opposite to the unit electrode of one polarity and for supporting the unit electrode of one polarity, the support protrusion being integrally formed with the ceramic dielectric on at least one surface o

Abstract: An optical waveguide device has an optical waveguide substrate and a supporting body for supporting the substrate. The substrate has a main body made of an electro-optic material and having a main face and an opposing face, optical waveguides, and electrodes for applying an electrical signal on the optical waveguides. At least a part of the opposing face of the supporting body opposing the substrate is covered with a conductive layer. It is thus possible to reduce the resonance due to substrate radiation leakage of the microwave signal into the whole of the optical waveguide substrate and supporting body.

Abstract: An optical modulator 1C has a substrate 2 of an electro-optic material and having first and second main faces, an optical waveguide formed on the substrate 2 and having first branched part 5 and a second branched part 3, and ground electrodes 4A, 4C and a signal electrode 4B provided on the side of the first main face of the substrate. The first branched part 5 and second branched part 3 are provided between the edges of the ground electrodes 4A, 4C and the edge of the signal electrode 4B, respectively. Microwave electric fields are applied onto interacting parts of the first branched part 5 and second branched part 3, respectively, to modulate light propagating in the first branched part 5 and second branched part 3, respectively. The integral values of field intensities over interaction lengths with electrodes in the first and second branched parts are different from each other so that a predetermined chirp amount is obtained.

Abstract: An optical waveguide device 1 has an optical waveguide substrate 19, a supporting body 2 for supporting the substrate 19 and a joining layer 3 for joining the substrate 19 and the supporting body 2. The substrate 19 has a flat plate-shaped main body 4 made of an electro-optic material with a thickness of 30 ?m or smaller and having first and second main faces 4a and 4b opposing each other, an optical waveguide provided on the side of the first main face 4a of the main body 4, and electrodes 7A to 7C provided on the side of the first main face 4a of the main body 4. The joining layer 3 joins the supporting body 2 at a joining face 4d and the second main face 4d of the main body 4. The joining face 2a of the supporting body 2 is substantially flat. Alternatively, the joining layer 3 has a thickness of 200 ?m or lower.

Abstract: An object of the present invention is to improve the modulation efficiency of an optical modulator in a high frequency band while satisfying the velocity matching condition. An optical modulator is provided having an optical waveguide for propagating light, an electrode for applying a voltage on the waveguide for modulating the light, a signal source electrically connected to the electrode and a terminating resistance electrically connected to the electrode. The signal source has a characteristic impedance Zi and the terminating resistance has an impedance Zl satisfying the formula (Zi<Zl). Alternatively, the signal source has a characteristic impedance Zi and the electrode has a characteristic impedance Zc satisfying the formula (Zi<Zc).

Abstract: A Mach-Zehnder optical waveguide is disposed in a substrate made of a material having an electro-optic effect. Coplanar-waveguide modulating electrodes are disposed on a principal surface of the substrate. A dielectric layer is disposed on a reverse surface of the substrate. A supporting substrate having a recess is disposed in contact with the dielectric layer such that the recess is located at a position corresponding to a modulating region. The relationship: ?r>?s is satisfied where ?r represents the dielectric constant of the supporting substrate and ?s represents the dielectric constant of the dielectric constant of solid, liquid, or gaseous substance in the recess.

Abstract: An optical waveguide device 1A has a substrate 22 and a supporting body 10 for supporting the substrate. The substrate 22 has a main body 2 made of an electrooptic material and one and the other main faces, optical waveguides 3a, 3b and electrodes 4B, 4C provided on the side of the one main face 2a of the main body 2 The supporting body 10 is joined with the substrate 2 on the side of the other main face, and the electrode has a feedthrough portion. The device 1A further has a low dielectric portion 7 provided under the feed through portion and between the other main face 2b of the main body 2 and the supporting body 10.

Abstract: An optical modulator modulates light propagating in a three-dimensional optical waveguide 5 by applying a voltage on the waveguide. The modulator has a three dimensional optical waveguide 5 having at least a pair of branched portions 5b, 5c and a recombining portion 5f of the branched portions 5c, 5d and radiating light of off-mode, and a slab optical waveguide 4 guiding the light of off-mode. The modulator also has modulating electrodes 7A, 7B, 7C for applying a signal voltage and a direct current bias on the waveguide 5 to modulate light propagating in the waveguide 5. The modulator further has a photo detector 13 for detecting light radiated from the slab optical waveguide 4, and a controlling unit 15 for varying the direct current bias based on an output from the photo detector 13 so as to control the operational point of the modulator. According to the modulator, the operational point may be controlled with improved efficiency and stability.

Abstract: An object of the present invention is to improve the modulation efficiency of an optical modulator in a high frequency band while satisfying the velocity matching condition. An optical modulator is provided having an optical waveguide for propagating light, an electrode for applying a voltage on the waveguide for modulating the light, a signal source electrically connected to the electrode and a terminating resistance electrically connected to the electrode. The signal source has a characteristic impedance Zi and the terminating resistance has an impedance Zl satisfying the formula (Zi<Zl). Alternatively, the signal source has a characteristic impedance Zi and the electrode has a characteristic impedance Zc satisfying the formula (Zi<Zc).

Abstract: Major surface of a substrate having an optical waveguide and a modulation electrode is pasted to a base substrate through a thermosetting resin, and then the rear surface of the substrate is machined thus making thin the entirety. Subsequently, the rear surface of the substrate thus rendered thin is subjected to machining or laser machining to form a thin part, which is further subjected to machining or laser machining to form a first thin part at a part, including the optical waveguide, of the thin part and a second thin part thinner than the first thin part contiguously thereto. Thereafter, the rear surface of the substrate is pasted to the major surface of a supporting substrate through a thermosetting resin and the base substrate is stripped thus obtaining an optical modulator.

Abstract: An optical waveguide device 1 has an optical waveguide substrate 19, a supporting body 2 for supporting the substrate 19 and a joining layer 3 for joining the substrate 19 and the supporting body 2. The substrate 19 has a flat plate-shaped main body 4 made of an electro-optic material with a thickness of 30 &mgr;m or smaller and having first and second main faces 4a and 4b opposing each other, an optical waveguide provided on the side of the first main face 4a of the main body 4, and electrodes 7A to 7C provided on the side of the first main face 4a of the main body 4. The joining layer 3 joins the supporting body 2 at a joining face 4d and the second main face 4d of the main body 4. The joining face 2a of the supporting body 2 is substantially flat. Alternatively, the joining layer 3 has a thickness of 200 &mgr;m or lower.

Abstract: An optical waveguide device has an optical waveguide substrate and a supporting substrate. The optical waveguide substrate has a main body made of an electro-optic material and having a first main face and a second main face, an optical waveguide formed in or on the main body and an electrode formed on the side of the first main face of the main body. The supporting substrate is joined with the second main face of the main body. A low dielectric portion with a dielectric constant lower than that of the electro-optic material is formed in the supporting substrate.

Abstract: A Mach-Zehnder optical waveguide is disposed in a substrate made of a material having an electro-optic effect. Coplanar-waveguide modulating electrodes are disposed on a principal surface of the substrate. A dielectric layer is disposed on a reverse surface of the substrate. A supporting substrate having a recess is disposed in contact with the dielectric layer such that the recess is located at a position corresponding to a modulating region. The relationship: &egr;r>&egr;s is satisfied where &egr;r represents the dielectric constant of the supporting substrate and &egr;s represents the dielectric constant of the dielectric constant of solid, liquid, or gaseous substance in the recess.

Abstract: An object of the invention is to provide an electrode system for optical modulation of an optical modulator to reduce a thickness “E” of an electrode required for velocity matching and for reducing a propagation loss in the electrode. A substrate 2 is made of an electrooptic material and has one and the other main faces 2a, 2b opposing each other. An electrode system 20A is provided on the substrate 2 for applying a voltage for modulating light propagating in optical waveguides 6A and 6B. The electrode system 20A includes ground electrodes 3A, 3B and a signal electrode 4. A ratio “W/G” of a width “W” of the signal electrode 4 to a gap “G” between the ground and signal electrodes is 0.8 or higher. Preferably, the substrate 2 has a thickness “T” of 20 &mgr;m or larger, in a region where the optical waveguides 6A and 6B are provided.

Abstract: An optical waveguide device 1A has a substrate 22 and a supporting body 10 for supporting the substrate. The substrate 22 has a main body 2 made of an electrooptic material and one and the other main faces, optical waveguides 3a, 3b and electrodes 4B, 4C provided on the side of the one main face 2a of the main body 2 The supporting body 10 is joined with the substrate 2 on the side of the other main face, and the electrode has a feedthrough portion. The device 1A further has a low dielectric portion 7 provided under the feed through portion and between the other main face 2b of the main body 2 and the supporting body 10.

Abstract: After the name of a signal line is entered, cells are arranged and, a channel to be wired therein is generated. After the completion of global wiring and minute wiring, a compaction process is performed. Here, the transistor density TD of an integrated circuit device to which the compaction process has been executed is compared with a standard value TDst. The compaction process is repeated unless TD>TDst, and terminated when TD >TDst. The time to terminate the compaction process can be judged from objective standards regardless of the level of a designer's skill, so as to keep the layout design of an integrated circuit device above a certain level.

Abstract: A travelling wave-type optical modulator has a supporting substrate and a ferroelectric single crystalline layer on the supporting substrate. The ferroelectric single crystalline layer has thicker parts and thinner parts within the modulating region of the travelling wave-type optical modulator when viewed in the cross section of the modulating region. An optical waveguide is formed in the thicker part of the ferroelectric single crystalline layer, and electrodes for modulation are provided on the thinner part of the ferroelectric single crystalline layer between the adjacent thicker parts.

Abstract: An optical modulator modulates light propagating in a three-dimensional optical waveguide 5 by applying a voltage on the waveguide. The modulator has a three dimensional optical waveguide 5 having at least a pair of branched portions 5b, 5c and a recombining portion 5f of the branched portions 5c, 5d and radiating light of off-mode, and a slab optical waveguide 4 guiding the light of off-mode. The modulator also has modulating electrodes 7A, 7B, 7C for applying a signal voltage and a direct current bias on the waveguide 5 to modulate light propagating in the waveguide 5. The modulator further has a photo detector 13 for detecting light radiated from the slab optical waveguide 4, and a controlling unit 15 for varying the direct current bias based on an output from the photo detector 13 so as to control the operational point of the modulator. According to the modulator, the operational point may be controlled with improved efficiency and stability.

Abstract: An optical waveguide element includes a substrate made of a lithium tantalate single crystal or a lithium niobate-lithium tantalate solid solution single crystal and a bulky optical waveguide made of a lithium niobate single crystal is directly joined to the substrate. The c-axis of the single crystal substrate is tilted at an angle with respect to the surface of the substrate to which the bulky optical waveguide is joined. The tilted angle is preferably within a range of 17-37 degrees.