Patents by Inventor Atsushi Hayamizu

Atsushi Hayamizu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam writing method and charged particle beam writing apparatus
    Patent number: 8614428
    Abstract: The height of selected points on the surface of a mask is measured, and if the number of measurement errors in this measurement is less than a predetermined value, an approximated curved surface for the mask surface is generated. The measurement data and height data obtained from the approximated curved surface are then compared, and if there is no point at which the difference between the measurement data and the data obtained from the approximated curved surface is greater than a predetermined threshold value, then it is determined that the reliability of the approximated curved surface is high and the height of the mask surface is corrected in accordance with this approximated curved surface.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: December 24, 2013
    Assignee: NuFlare Technology, Inc.
    Inventors: Tomoyuki Horiuchi, Atsushi Hayamizu
  • CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS
    Publication number: 20100207017
    Abstract: The height of selected points on the surface of a mask is measured, and if the number of measurement errors in this measurement is less than a predetermined value, an approximated curved surface for the mask surface is generated. The measurement data and height data obtained from the approximated curved surface are then compared, and if there is no point at which the difference between the measurement data and the data obtained from the approximated curved surface is greater than a predetermined threshold value, then it is determined that the reliability of the approximated curved surface is high and the height of the mask surface is corrected in accordance with this approximated curved surface.
    Type: Application
    Filed: February 12, 2010
    Publication date: August 19, 2010
    Applicant: NuFlare Technology, Inc.
    Inventors: Tomoyuki Horiuchi, Atsushi Hayamizu