Patents by Inventor Atsushi Hidaka
Atsushi Hidaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200199753Abstract: In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13?) disposed between adjacent fluid heating sections.Type: ApplicationFiled: July 20, 2018Publication date: June 25, 2020Applicant: FUJIKIN INCORPORATEDInventors: Atsushi HIDAKA, Takatoshi NAKATANI, Keisuke NAKATSUJI, Keiji HIRAO, Yukio MINAMI, Nobukazu IKEDA
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Publication number: 20200149162Abstract: In order to optimally supply a raw material by using a heater, the fluid control device (100) includes a fluid heating section (1) provided with a flow path or a fluid accommodation portion inside, and a heater (10) for heating the fluid heating section, the heater having a heating element (10a) and a metallic heat transfer member (10b) thermally connected to the heating element and arranged so as to surround the fluid heating section, and the surface of the heat transfer member facing the fluid heating section includes a surface (S1) subjected to surface treatment for improving heat dissipation.Type: ApplicationFiled: July 20, 2018Publication date: May 14, 2020Applicant: FUJIKIN INCORPORATEDInventors: Atsushi HIDAKA, Takatoshi NAKATANI, Keisuke NAKATSUJI, Keiji HIRAO, Yukio MINAMI, Nobukazu IKEDA
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Patent number: 10646844Abstract: A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.Type: GrantFiled: April 11, 2016Date of Patent: May 12, 2020Assignee: FUJIKIN INCORPORATEDInventors: Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Takatoshi Nakatani, Satoru Yamashita, Kouji Nishino, Nobukazu Ikeda, Keiji Hirao
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Patent number: 10604840Abstract: To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L1 in the chamber 2, and a flow controller 4 that controls the flow rate of the gas flowing out from the chamber 2 and feeds the same. The protection tube 3 is horizontally inserted into a sidewall 2a of the chamber 2 and fixed thereto.Type: GrantFiled: November 2, 2015Date of Patent: March 31, 2020Assignee: FUJIKIN INCORPORATEDInventors: Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Satoru Yamashita, Keiji Hirao, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20200088561Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.Type: ApplicationFiled: December 22, 2017Publication date: March 19, 2020Applicant: FUJIKIN INCORPORATEDInventors: Atsushi HIDAKA, Takatoshi NAKATANI, Satoru YAMASHITA, Katsuyuki SUGITA, Kaoru HIRATA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
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Patent number: 10274356Abstract: A liquid level meter includes a first resistive temperature detector; a first temperature measuring body a liquid level detection section a temperature detection section detecting the temperatures of the first resistive temperature detector and the first temperature measuring body; a current control section determining a value of a current to apply to the first resistive temperature detector such that a difference between the temperatures of the first resistive temperature detector and the first temperature measuring body detected by the temperature detection section to be a first constant value; and a power supply unit supplying a current of the determined current value to the first resistive temperature detector; wherein the liquid level detection section determines whether the first resistive temperature detector is present in a liquid or outside of the liquid using the value of the current applied to the first resistive temperature detector.Type: GrantFiled: November 24, 2015Date of Patent: April 30, 2019Assignee: FUJIKIN INCORPORATEDInventors: Kaoru Hirata, Katsuyuki Sugita, Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda
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Patent number: 10073469Abstract: A flow meter includes an inlet side switching valve, an outlet side switching valve on a downstream of the inlet side valve, and a control valve on a downstream of the outlet side valve that are connected with each other by flow passages having internal volumes, a pressure sensor on an upstream side of the control valve, and a larger flow rate measuring section for calculating a flow rate based on a build-down volume of an internal volume of the passage between an outlet of the inlet side valve and an inlet of the control valve, and a smaller flow rate measuring section for calculating a flow rate based on a build-down volume of an inner capacity of the passage between an outlet of the outlet side valve and the inlet of the control valve.Type: GrantFiled: October 21, 2014Date of Patent: September 11, 2018Assignee: FUJIKIN INCORPORATEDInventors: Masaaki Nagase, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Atsushi Hidaka, Katsuyuki Sugita
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Patent number: 9994955Abstract: The present invention provides a raw material vaporization and supply device including a raw material receiving tank, a vaporizer for vaporizing liquid pressure-fed from the liquid receiving tank, a flow rate control device for adjusting a flow rate of raw material gas from the vaporizer, and a heating device for heating the vaporizer, the high-temperature pressure-type flow rate control device, and desired sections of flow passages connected to these devices, wherein Al2O3 passivation treatment, Cr2O3 passivation treatment, or FeF2 passivation treatment is applied to liquid contact parts or gas contact parts of metal surfaces of at least any of the raw material receiving tank, the vaporizer, the flow rate control device, the flow passages that links these component devices, or opening-and-closing valves that are disposed in the flow passages.Type: GrantFiled: November 20, 2013Date of Patent: June 12, 2018Assignee: FUJIKIN INCORPORATEDInventors: Atsushi Hidaka, Masaaki Nagase, Satoru Yamashita, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20180071702Abstract: A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.Type: ApplicationFiled: April 11, 2016Publication date: March 15, 2018Applicant: FUJIKIN INCORPORATEDInventors: Atsushi HIDAKA, Masaaki NAGASE, Kaoru HIRATA, Katsuyuki SUGITA, Takatoshi NAKATANI, Satoru YAMASHITA, Kouji NISHINO, Nobukazu IKEDA, Keiji HIRAO
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Publication number: 20170364099Abstract: To provide a flow control system with build-down system flow monitoring that realizes flow monitoring close to real-time monitoring by combining build-down system flow rate measurement with the upstream side of the flow control system without using a thermal type flow sensor by effectively utilizing high pressure fluctuation resistance characteristics of the flow control system, and can be significantly downsized and reduced in cost.Type: ApplicationFiled: June 26, 2017Publication date: December 21, 2017Inventors: Masaaki Nagase, Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20170327949Abstract: [Problem] To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. [Means for Resolution] The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L1 in the chamber 2, and a flow controller 4 that controls the flow rate of the gas flowing out from the chamber 2 and feeds the same. The protection tube 3 is horizontally inserted into a sidewall 2a of the chamber 2 and fixed thereto.Type: ApplicationFiled: November 2, 2015Publication date: November 16, 2017Inventors: Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Satoru Yamashita, Keiji Hirao, Kouji Nishino, Nobukazu Ikeda
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Patent number: 9791867Abstract: A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.Type: GrantFiled: March 17, 2014Date of Patent: October 17, 2017Assignee: FUJIKIN INCORPORATEDInventors: Masaaki Nagase, Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20170268919Abstract: A liquid level meter includes a first resistive temperature detector; a first temperature measuring body a liquid level detection section a temperature detection section detecting the temperatures of the first resistive temperature detector and the first temperature measuring body; a current control section determining a value of a current to apply to the first resistive temperature detector such that a difference between the temperatures of the first resistive temperature detector and the first temperature measuring body detected by the temperature detection section to be a first constant value; and a power supply unit supplying a current of the determined current value to the first resistive temperature detector; wherein the liquid level detection section determines whether the first resistive temperature detector is present in a liquid or outside of the liquid using the value of the current applied to the first resistive temperature detector.Type: ApplicationFiled: November 24, 2015Publication date: September 21, 2017Applicant: FUJIKIN INCORPORATEDInventors: Kaoru HIRATA, Katsuyuki SUGITA, Atsushi HIDAKA, Kouji NISHINO, Nobukazu IKEDA
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Patent number: 9746856Abstract: A multi-hole orifice plate for flow control includes an orifice plate for controlling the flow rate of a fluid, wherein the opening area of one orifice necessary for the passage of a predetermined flow rate of fluid is divided to provide a plurality of orifices having a total opening area equal to said opening area.Type: GrantFiled: April 9, 2014Date of Patent: August 29, 2017Assignee: FUJIKIN INCORPORATEDInventors: Kaoru Hirata, Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Katsuyuki Sugita, Takashi Hirose
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Patent number: 9733649Abstract: To provide a flow control system with build-down system flow monitoring that realizes flow monitoring close to real-time monitoring by combining build-down system flow rate measurement with the upstream side of the flow control system without using a thermal type flow sensor by effectively utilizing high pressure fluctuation resistance characteristics of the flow control system, and can be significantly downsized and reduced in cost.Type: GrantFiled: April 15, 2013Date of Patent: August 15, 2017Assignee: FUJIKIN INCORPORATEDInventors: Masaaki Nagase, Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda
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Patent number: 9574917Abstract: A pressure type flow rate control device provides flow rate control for gas at 100-500° C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage.Type: GrantFiled: May 30, 2012Date of Patent: February 21, 2017Assignee: FUJIKIN INCORPORATEDInventors: Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino
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Patent number: 9556518Abstract: A raw material gas supply apparatus includes a liquid raw material gas supply source, a source tank storing liquid raw material, a gas distribution passage through which raw material gas comprising steam of the liquid raw material is supplied to a process chamber from the source tank, an automatic pressure regulator installed on an upstream side of the gas passage, wherein the automatic pressure regulator keeps supply pressure of the raw material gas at a set value, a supply gas switching valve installed on a downstream side of the gas passage, wherein this valve opens and closes the gas passage, an orifice provided on at least one of an inlet side or outlet side of the valve, wherein the orifice regulates flow rate of the raw material gas, and a constant temperature heating device heats the source tank, the gas passage, the valve and the orifice to a set temperature.Type: GrantFiled: January 8, 2014Date of Patent: January 31, 2017Assignee: FUJIKIN INCORPORATEDInventors: Masaaki Nagase, Atsushi Hidaka, Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20160282880Abstract: A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.Type: ApplicationFiled: March 17, 2014Publication date: September 29, 2016Applicant: FUJIKIN INCORPORATEDInventors: Masaaki NAGASE, Atsushi HIDAKA, Kouji NISHINO, Nobukazu IKEDA
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Publication number: 20160239026Abstract: A flow meter includes an inlet side switching valve, an outlet side switching valve on a downstream of the inlet side valve, and a control valve on a downstream of the outlet side valve that are connected with each other by flow passages having internal volumes, a pressure sensor on an upstream side of the control valve, and a larger flow rate measuring section for calculating a flow rate based on a build-down volume of an internal volume of the passage between an outlet of the inlet side valve and an inlet of the control valve, and a smaller flow rate measuring section for calculating a flow rate based on a build-down volume of an inner capacity of the passage between an outlet of the outlet side valve and the inlet of the control valve.Type: ApplicationFiled: October 21, 2014Publication date: August 18, 2016Applicant: FUJIKIN INCORPORATEDInventors: Masaaki NAGASE, Nobukazu IKEDA, Kouji NISHINO, Ryousuke DOHI, Atsushi HIDAKA, Katsuyuki SUGITA
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Publication number: 20160070271Abstract: A multi-hole orifice plate for flow control includes an orifice plate for controlling the flow rate of a fluid, wherein the opening area of one orifice necessary for the passage of a predetermined flow rate of fluid is divided to provide a plurality of orifices having a total opening area equal to said opening area.Type: ApplicationFiled: April 9, 2014Publication date: March 10, 2016Applicant: FUJIKIN INCORPORATEDInventors: Kaoru HIRATA, Atsushi HIDAKA, Masaaki NAGASE, Ryousuke DOHI, Nobukazu IKEDA, Kouji NISHINO, Katsuyuki SUGITA, Takashi HIROSE